Titanium dioxide \(\varvec{(TiO}_{\varvec{2}}\varvec{)}\) nanostructures are highly promising for sensor development due to their remarkable properties, including a large surface area, excellent chemical stability, tunable electronic and optical properties, and biocompatibility. This study compared titanium (Ti) and titanium alloy ( \(\varvec{Ti}\hspace{0.2cm}\varvec{6Al}\hspace{0.2cm}\varvec{4V}\) ) surfaces modified by electrochemical anodization and subsequent annealing. Different anodization parameters and annealing temperatures were tested to evaluate the morphological and electrochemical properties of the obtained nanotube arrays. The morphological, compositional, and electrochemical characteristics of the nanostructured surfaces were analyzed using Field Emission Scanning Electron Microscopy (FESEM), Raman Spectroscopy (RS), X-ray Diffraction analysis (XRD), X-ray Photoelectron Spectroscopy (XPS), Cyclic Voltammetry (CV), and Electrochemical Capacitance Spectroscopy (ECS). The anodization conditions that improve the capacitive behavior of the \(\varvec{TiO}_{\varvec{2}}\) nanotube arrays in both \(\varvec{Ti}\) and \(\varvec{Ti}\;\varvec{6Al}\;\varvec{4V}\) were 60 V - 30 minutes, followed by annealing at temperatures above 400 ° C. The quantum capacitance is maximized when the electrochemical capacitance spectrum is measured near the peak voltage identified in the CV analysis.
