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<p>This study investigated the influence of target composition, reactive gas concentration, and annealing temperature on the formation of the MAX phase in coatings deposited by reactive D.C. magnetron sputtering and subsequent annealing. For this aim, Ti-Al-C coatings were deposited using two different Ti-Al alloy targets with atomic ratios of (1:1) and (1:2) in a CH<sub>4</sub>/Ar mixture atmosphere with various ratios (1/20, 1/10) at room temperature. The coatings were then annealed in a vacuum furnace at 800&#xa0;°C and 1000&#xa0;°C. XRD analysis showed that the MAX phase could not form in the coating produced by the 1Ti-1Al target due to insufficient aluminum content, resulting in the Ti<sub>3</sub>AlC phase with a perovskite cubic crystal structure. Conversely, the 1Ti-2Al target produced coatings containing the gamma TiAl phase with a tetragonal structure and the Ti<sub>2</sub>AlC MAX phase with a hexagonal layered structure. Increasing the concentration of CH<sub>4</sub> gas led to the formation of more MAX phase as a result of the transformation of the gamma TiAl phase into the Ti<sub>2</sub>AlC MAX phase. Microstructure characterization showed that the coating was compact, dense, and without cracks or porosity. Nano-indentation and Nano-scratch analysis determined the elastic modulus of 73–77 GPa, hardness of 6.5–7.5 GPa, and friction coefficient of 0.2–0.3 for the coating with the highest amount of Ti<sub>2</sub>AlC MAX phase produced by sputtering of the 1Ti-2Al target in a CH<sub>4</sub>/Ar atmosphere with a 1/10 ratio and annealing at 800&#xa0;°C.</p>

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Investigation of sputtering conditions and thermal annealing on formation of Ti-Al-C coating for MAX phase synthesis

  • 期刊论文

  • 发表日期：

    2025年6月10日

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  • Zahra Mahmoudi,
  • Seyed Hadi Tabaian,
  • Farzad Mahboubi,
  • Hamid Reza Rezaie

摘要

This study investigated the influence of target composition, reactive gas concentration, and annealing temperature on the formation of the MAX phase in coatings deposited by reactive D.C. magnetron sputtering and subsequent annealing. For this aim, Ti-Al-C coatings were deposited using two different Ti-Al alloy targets with atomic ratios of (1:1) and (1:2) in a CH4/Ar mixture atmosphere with various ratios (1/20, 1/10) at room temperature. The coatings were then annealed in a vacuum furnace at 800 °C and 1000 °C. XRD analysis showed that the MAX phase could not form in the coating produced by the 1Ti-1Al target due to insufficient aluminum content, resulting in the Ti3AlC phase with a perovskite cubic crystal structure. Conversely, the 1Ti-2Al target produced coatings containing the gamma TiAl phase with a tetragonal structure and the Ti2AlC MAX phase with a hexagonal layered structure. Increasing the concentration of CH4 gas led to the formation of more MAX phase as a result of the transformation of the gamma TiAl phase into the Ti2AlC MAX phase. Microstructure characterization showed that the coating was compact, dense, and without cracks or porosity. Nano-indentation and Nano-scratch analysis determined the elastic modulus of 73–77 GPa, hardness of 6.5–7.5 GPa, and friction coefficient of 0.2–0.3 for the coating with the highest amount of Ti2AlC MAX phase produced by sputtering of the 1Ti-2Al target in a CH4/Ar atmosphere with a 1/10 ratio and annealing at 800 °C.