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<p>A soft X-ray energy materials research beamline (BL20U2), a branch of energy materials beamline (E-line), has been constructed in the Shanghai Synchrotron Radiation Facility (SSRF) Phase-II project. It is now operational for soft X-ray resonant emission spectroscopy (RXES) and soft X-ray resonant elastic scattering (REXS) investigations. Optical optimization was implemented for high performance, e.g., photon flux, energy-resolving power, and focus spot size. RXES experiments show that the energy range extends from 150 to 1500&#xa0;eV. The elastic peak measured near titanium absorption edge (@445&#xa0;eV) indicates an energy resolution of the RXES spectrometer of 65&#xa0;meV. The measured photon flux is <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(3\times 10^{12}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mn>3</mn> <mo>×</mo> <msup> <mn>10</mn> <mn>12</mn> </msup> </mrow> </math></EquationSource> </InlineEquation> photons/s at 244&#xa0;eV at the RXES sample position for an SSRF electron energy of 3.5&#xa0;GeV and a projected ring current as 300&#xa0;mA. The spot size at the RXES sample position is 23 μm in the horizontal direction and 7.9&#xa0;<InlineEquation ID="IEq3"> <EquationSource Format="TEX">\(\upmu \text {m}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mi mathvariant="normal">μ</mi> <mtext>m</mtext> </mrow> </math></EquationSource> </InlineEquation> in the vertical direction, respectively. Moreover, the angular resolution of elastic REXS scatterometer reaches 0.005° through measurement of X-ray reflection from the single-crystal silicon wafers. A sample of the REXS scatterometer is vibrationally decoupled from its chamber and cooled using copper braids connected from an open cycle liquid helium cryo reservoir, whereas the minimum sample temperature is below 15&#xa0;K.</p>

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Design and performance of the soft X-ray energy materials research beamline at SSRF

  • 期刊论文

  • 发表日期：

    2026年1月4日

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  • Zhen-Hua Chen,
  • Li-Min Zhou,
  • Hai-Tao Li,
  • Ying Zou,
  • Yong Wang,
  • Ren-Zhong Tai

摘要

A soft X-ray energy materials research beamline (BL20U2), a branch of energy materials beamline (E-line), has been constructed in the Shanghai Synchrotron Radiation Facility (SSRF) Phase-II project. It is now operational for soft X-ray resonant emission spectroscopy (RXES) and soft X-ray resonant elastic scattering (REXS) investigations. Optical optimization was implemented for high performance, e.g., photon flux, energy-resolving power, and focus spot size. RXES experiments show that the energy range extends from 150 to 1500 eV. The elastic peak measured near titanium absorption edge (@445 eV) indicates an energy resolution of the RXES spectrometer of 65 meV. The measured photon flux is \(3\times 10^{12}\) 3 × 10 12 photons/s at 244 eV at the RXES sample position for an SSRF electron energy of 3.5 GeV and a projected ring current as 300 mA. The spot size at the RXES sample position is 23 μm in the horizontal direction and 7.9  \(\upmu \text {m}\) μ m in the vertical direction, respectively. Moreover, the angular resolution of elastic REXS scatterometer reaches 0.005° through measurement of X-ray reflection from the single-crystal silicon wafers. A sample of the REXS scatterometer is vibrationally decoupled from its chamber and cooled using copper braids connected from an open cycle liquid helium cryo reservoir, whereas the minimum sample temperature is below 15 K.