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<p>Microresonators are widely employed in mass particle sensing, energy harvesting and micro-actuation devices. Improved design of such resonators is essential by proper selection of geometric and material characteristics for accurate output predictions. This work proposes the design and analysis of a coupled dual beam functionally graded microcantilever resonator to enhance the sensitivity of mass particle predictions. A continuous microbeam model of the electrostatically actuated bi-directional functionally graded coupled microcantilever resonator is formulated and the equations of motion are derived using Hamilton’s principle via modified couple stress theory. The resulting partial differential equations are discretized using Galerkin’s approach and the&#xa0;occurrence of the primary and super-harmonic resonances are illustrated using the method of multiple scales. Effects of grading indices, magnitudes of electrostatic excitation, magnitude and location of the mass particle on the mass-sensitivity are studied. It is observed that a small change of mass attached to the secondary microcantilever results in a significant change in amplitude ratio of the functionally graded microbeams as compared to a similar homogeneous configuration. To improve the sensitivity and structural stability of the system, constrained optimization model is formulated and solved using the modified firefly optimization methodology. The optimized design variables have resulted in a significant enhancement in sensitivity, with an approximate improvement of 25.27%, while maintaining system stability.</p>

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Dynamic Analysis and Optimal Design of Electrostatically Excited Coupled Functionally Graded Microcantilever Resonator

  • 期刊论文

  • 发表日期：

    2025年7月24日

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  • Uttam Kumar Kar,
  • J. Srinivas

摘要

Microresonators are widely employed in mass particle sensing, energy harvesting and micro-actuation devices. Improved design of such resonators is essential by proper selection of geometric and material characteristics for accurate output predictions. This work proposes the design and analysis of a coupled dual beam functionally graded microcantilever resonator to enhance the sensitivity of mass particle predictions. A continuous microbeam model of the electrostatically actuated bi-directional functionally graded coupled microcantilever resonator is formulated and the equations of motion are derived using Hamilton’s principle via modified couple stress theory. The resulting partial differential equations are discretized using Galerkin’s approach and the occurrence of the primary and super-harmonic resonances are illustrated using the method of multiple scales. Effects of grading indices, magnitudes of electrostatic excitation, magnitude and location of the mass particle on the mass-sensitivity are studied. It is observed that a small change of mass attached to the secondary microcantilever results in a significant change in amplitude ratio of the functionally graded microbeams as compared to a similar homogeneous configuration. To improve the sensitivity and structural stability of the system, constrained optimization model is formulated and solved using the modified firefly optimization methodology. The optimized design variables have resulted in a significant enhancement in sensitivity, with an approximate improvement of 25.27%, while maintaining system stability.