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<p>There is a considerable demand for microchannels in micro-electro-mechanical systems (MEMS) for heat transfer and biomedical microfluidic system applications. The present paper investigates the machining of microchannels using a twin tool with three dielectric fluids using an in-house micro-electro-discharge machine (μ-EDM). A tailor-made twin-tool setup is fabricated and utilized instead of a single tool to improve the μ-EDM production rate in microchannel machining. Three dielectric fluids (DFs), such as deionized (DI) water, DI water with SiC powder (5&#xa0;g/l), and DI water with diamond powder (5&#xa0;g/l), are used to machine microchannels on a copper plate with two tubular copper wires, the size of each Ø300 μm. The input parameters, such as voltage, <i>T</i><sub>on</sub>, and <i>T</i><sub>off,</sub> are varied at three levels, and the L<sub>9</sub> Taguchi orthogonal array is selected to conduct nine experiments with each dielectric fluid. The output performances, like material removal rate (MRR), tool wear rate (TWR), channel width, depth, and surface roughness (Ra), are analyzed. Each set is optimized individually using gray relational analysis with the entropy weight method (GRA-EWM) to maximize the MRR and channel depth and minimize Ra, channel width, and TWR. The significant parameter of each dielectric fluid is identified using ANOVA. High-resolution scanning electron microscope (HR-SEM) and 3D profilometer are used to obtain machined surface channel images to examine the surface topography and channel characteristics. The output responses of powder-mixed dielectric fluids are compared with plain DI water, and the results are discussed. The experimental investigation shows minimal surface defects and a better surface finish of microchannels achieved through the diamond powder mixed with DI water compared to the other two dielectric fluid media.</p>

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Investigation of twin microchannel machining on copper plate with different dielectric fluids using μ-EDM

  • 期刊论文

  • 发表日期：

    2025年8月8日

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  • Aruna Kotlapati,
  • Somashekhar S. Hiremath

摘要

There is a considerable demand for microchannels in micro-electro-mechanical systems (MEMS) for heat transfer and biomedical microfluidic system applications. The present paper investigates the machining of microchannels using a twin tool with three dielectric fluids using an in-house micro-electro-discharge machine (μ-EDM). A tailor-made twin-tool setup is fabricated and utilized instead of a single tool to improve the μ-EDM production rate in microchannel machining. Three dielectric fluids (DFs), such as deionized (DI) water, DI water with SiC powder (5 g/l), and DI water with diamond powder (5 g/l), are used to machine microchannels on a copper plate with two tubular copper wires, the size of each Ø300 μm. The input parameters, such as voltage, Ton, and Toff, are varied at three levels, and the L9 Taguchi orthogonal array is selected to conduct nine experiments with each dielectric fluid. The output performances, like material removal rate (MRR), tool wear rate (TWR), channel width, depth, and surface roughness (Ra), are analyzed. Each set is optimized individually using gray relational analysis with the entropy weight method (GRA-EWM) to maximize the MRR and channel depth and minimize Ra, channel width, and TWR. The significant parameter of each dielectric fluid is identified using ANOVA. High-resolution scanning electron microscope (HR-SEM) and 3D profilometer are used to obtain machined surface channel images to examine the surface topography and channel characteristics. The output responses of powder-mixed dielectric fluids are compared with plain DI water, and the results are discussed. The experimental investigation shows minimal surface defects and a better surface finish of microchannels achieved through the diamond powder mixed with DI water compared to the other two dielectric fluid media.