Scholarlink

<p>TiO<sub>2</sub> thin films were deposited on glass substrates using a precursor free spin-coating method, with spin speeds varied from 1000&#xa0;rpm to 4000&#xa0;rpm for microstructure optimization. Increasing the spin speed improved film uniformity and reduced nanoparticle agglomeration, with the 4000&#xa0;rpm film exhibiting the most compact and defect-free morphology by FESEM analysis. XRD patterns confirmed the anatase phase, and FT-IR analysis was confirmed the presence of Ti–O–Ti bonds and hydroxyl groups on the surface. AFM and PL analyses indicated high crystallinity and low surface roughness at 4000&#xa0;rpm. UV–Visible spectroscopy showed a bandgap of 3.13&#xa0;eV with strong UV absorption, and contact angle measurements demonstrated enhanced hydrophilicity with increasing spin speed. The optimized TiO<sub>2</sub> thin film, when tested as a humidity sensor, exhibited a sensitivity of 89.7% (5–50% RH), a response time of approximately 240&#xa0;s, a recovery time of less than 300&#xa0;s, and a hysteresis of 8.1%, with minimal baseline drift. The precursor-free fabrication route is cost-effective, environmentally friendly, and compatible with scalable processing, confirming the suitability of the optimized TiO<sub>2</sub> thin film for humidity sensing at room temperature.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Tailoring TiO2 Thin Film Properties Through Spin-coating and the Critical Role of Rotational Speed in Humidity Sensor Fabrication

  • 期刊论文

  • 发表日期：

    2026年1月7日

查看全文
  • Reshma Vasu,
  • Vasuki T,
  • Ashokan S

摘要

TiO2 thin films were deposited on glass substrates using a precursor free spin-coating method, with spin speeds varied from 1000 rpm to 4000 rpm for microstructure optimization. Increasing the spin speed improved film uniformity and reduced nanoparticle agglomeration, with the 4000 rpm film exhibiting the most compact and defect-free morphology by FESEM analysis. XRD patterns confirmed the anatase phase, and FT-IR analysis was confirmed the presence of Ti–O–Ti bonds and hydroxyl groups on the surface. AFM and PL analyses indicated high crystallinity and low surface roughness at 4000 rpm. UV–Visible spectroscopy showed a bandgap of 3.13 eV with strong UV absorption, and contact angle measurements demonstrated enhanced hydrophilicity with increasing spin speed. The optimized TiO2 thin film, when tested as a humidity sensor, exhibited a sensitivity of 89.7% (5–50% RH), a response time of approximately 240 s, a recovery time of less than 300 s, and a hysteresis of 8.1%, with minimal baseline drift. The precursor-free fabrication route is cost-effective, environmentally friendly, and compatible with scalable processing, confirming the suitability of the optimized TiO2 thin film for humidity sensing at room temperature.