Design and fabrication of nanolayered colorless polyimide/Si3N4 optical film
摘要
In this study, low-reflective multilayer films (LRMFs) and high-reflective multilayer films (HRMFs) were designed and manufactured using colorless polyimide (CPI) as a low refractive index layer and Si3N4 as a high refractive index layer. A numerical simulation was conducted to design a nanolayered structure with different reflectivity characteristics at specific wavelengths. Rheological analysis was performed to determine a solution concentration needed for coating CPI at the nanoscale via the wet process. A layer of 89 nm was found to be formed stably using a 5wt% CPI solution at 5000 rpm. The results revealed that LRMFs exhibited less than 1% reflectivity at the central wavelength, while HRMFs showed more than 40% reflectivity at the central wavelength. Morphological analysis confirmed that the designed nanostructures were successfully fabricated. This research has provided a new way to fabricate optical film through the wet process.
Graphical abstract