<p>In this study, low-reflective multilayer films (LRMFs) and high-reflective multilayer films (HRMFs) were designed and manufactured using colorless polyimide (CPI) as a low refractive index layer and Si<sub>3</sub>N<sub>4</sub> as a high refractive index layer. A numerical simulation was conducted to design a nanolayered structure with different reflectivity characteristics at specific wavelengths. Rheological analysis was performed to determine a solution concentration needed for coating CPI at the nanoscale via the wet process. A layer of 89&#xa0;nm was found to be formed stably using a 5wt% CPI solution at 5000&#xa0;rpm. The results revealed that LRMFs exhibited less than 1% reflectivity at the central wavelength, while HRMFs showed more than 40% reflectivity at the central wavelength. Morphological analysis confirmed that the designed nanostructures were successfully fabricated. This research has provided a new way to fabricate optical film through the wet process.</p> Graphical abstract <p></p>

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Design and fabrication of nanolayered colorless polyimide/Si3N4 optical film

  • Jae Seung Lee,
  • Zheng Min Huang,
  • Young Seok Song

摘要

In this study, low-reflective multilayer films (LRMFs) and high-reflective multilayer films (HRMFs) were designed and manufactured using colorless polyimide (CPI) as a low refractive index layer and Si3N4 as a high refractive index layer. A numerical simulation was conducted to design a nanolayered structure with different reflectivity characteristics at specific wavelengths. Rheological analysis was performed to determine a solution concentration needed for coating CPI at the nanoscale via the wet process. A layer of 89 nm was found to be formed stably using a 5wt% CPI solution at 5000 rpm. The results revealed that LRMFs exhibited less than 1% reflectivity at the central wavelength, while HRMFs showed more than 40% reflectivity at the central wavelength. Morphological analysis confirmed that the designed nanostructures were successfully fabricated. This research has provided a new way to fabricate optical film through the wet process.

Graphical abstract