A wearable MEMS sensor using GPDL-PDMS composite porous dielectric layer for non-invasive arterial pulse wave monitoring
摘要
Continuous and non-invasive monitoring of arterial pressure is critically important for early detection and management of cardiovascular disorders, as it provides vital insights into blood pressure variations, arterial stiffness, and vascular aging. However, achieving accurate and sensitive measurement of subtle arterial pulse signals under low-pressure physiological conditions remains a significant challenge. This study aims to develop a flexible, wearable capacitive pressure sensor capable of reliably capturing arterial pulse signals at the radial artery. To address this, a capacitive MEMS sensor incorporating a novel graphite–polydimethylsiloxane porous dielectric layer (GPDL-PDMS) was designed, fabricated, and characterized. A sacrificial sucrose porogen was employed to create an interconnected porous microstructure within the PDMS matrix, enhancing compressibility and effective dielectric permittivity. Furthermore, the inclusion of graphite fillers improves dielectric response and mechanical sensitivity, enabling precise detection within the low-pressure range of 0–10 kPa. The developed sensor demonstrates high sensitivity, particularly below 5 kPa, making it highly suitable for physiological monitoring. When deployed over the radial artery, it successfully captures arterial pulse waveforms with a clear distinction between systolic and diastolic peaks, facilitating the extraction of key cardiovascular parameters such as pulse wave velocity and augmentation index. Overall, the proposed sensor, combining low-cost materials, simple fabrication, and enhanced sensitivity, presents a promising platform for next-generation wearable systems for continuous, real-time cardiovascular monitoring and early-stage diagnosis.