Material analysis of MEMS sensor for detection of earthquake severity
摘要
A novel MEMS-based capacitive accelerometer for early earthquake detection is proposed. The Minimum frequency range of an earthquake is 20 Hz and the maximum will depend on the soil and atmospheric conditions in place. The reading on the rector scale can be recorded as less than or equal to 2.5 and the maximum range that an earthquake can be recorded is greater than or equal to 8.0. The Proposed structure has dimensions 1300, 400, and 10 µm in length, breadth, and thickness respectively. The eigenfrequency and displacement analysis was initially done for the proposed structure. The materials like silicon oxide, PMMA, PDMS, and Polycrystalline silicon were used to analyse the proposed structure. As per the simulated analysis, all the frequencies are within the frequency range of the earthquake. The sensitivity analysis has been done and silicon oxide has given 0.3070 high sensitivity among the proposed materials, and it has also shown the capacitive sensitivity as high 0.36. The voltage and capacitance analysis has been done for the proposed structure and the value of capacitance for the maximum value of voltage is 6.69 × 10−20 farads. The proposed structure is designed for 1 g acceleration using COMSOL Multi-Physics.