Thermal Analysis in Thermo-optic Mach–Zehnder Switch with Insulating Trench Based on SOI
摘要
In this paper, we propose the schematic configuration of the thermo-optic switch with air trench and simulate the relative temperature variation, thermal crosstalk and response time in the silicon waveguide using the finite element method. Results show that higher thermal efficiency and less switching power with 14.9milliwatt can be obtained in the thermo-optic switch with air isolating trench. Meanwhile, the extinction ratio of larger than 18.5 dB is obtained for the trench structure when considering the thermal crosstalk between two phase shifters. The short response time including rising time of 18us and falling time of 17us means the proposed thermo-optic switch has great advantages in enhancing the stability and usability in optical networking.