Pressure-induced deformation in ultra-low expansion dual fabry–perot cavities
摘要
The realization and dissemination of the pascal based on fundamental physical constants through optical refractometry are increasingly replacing existing primary pressure standards such as liquid column manometers and piston gauges. The Optical Pressure Standard (OPS) uses a dual Fabry-Perot cavity system in which pressure is derived from gas refractivity, but cavity distortions caused by gas pressure introduce significant uncertainty. In this work, we present a detailed finite element analysis of a dual ULE-based Fabry–Perot cavity designed for use in an optical pressure standard. Three-dimensional simulations were performed at 100 kPa to quantify spacer compression and mirror deformation within the central optical region, which defines the effective cavity length. The resulting distortion coefficients are 1.00 × 10⁻¹¹ Pa⁻¹ for the measurement cavity and 1.25 × 10⁻¹¹ Pa⁻¹ for the reference cavity. The deformation magnitudes are consistent with those reported by major optical metrology laboratories, indicating that the design is suitable for further experimental validation. These findings establish the necessary design foundation and quantified performance parameters essential for the realization and future experimental validation of the CSIR-National Physical Laboratory (CSIR-NPL) OPS system.