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<p>The SiN waveguide process fabricated on the SOI platform enables the integration of passive optical functions with active functionalities on the same platform. In this study, two SiN-based Arrayed Waveguide Gratings (AWGs) were designed and fabricated: one serving as a wavelength multiplexer (MUX) and the other as a demultiplexer (DeMUX) for Coarse Wavelength Division Multiplexing systems. Experimental results demonstrate that the insertion losses of the fabricated AWG MUX and DeMUX are less than 4.31&#xa0;dB for the MUX and 2.13&#xa0;dB for the DeMUX, with channel crosstalk values of less than −17.08&#xa0;dB and −26.34&#xa0;dB, respectively. The 3&#xa0;dB bandwidth of the MUX exceeds 11&#xa0;nm, while that of the DeMUX surpasses 6.4&#xa0;nm. Additionally, the central wavelength of the AWG exhibits a linear shift in response to temperature changes. After transmitting a 26.5625 Gbaud NRZ and 53.125&#xa0;Gb/s PAM4 signal, a clear eye diagram is maintained, demonstrating the potential of these modulation formats for high-performance optical communication systems.</p>

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Design and fabrication of SiN AWGs on an SOI platform

  • 期刊论文

  • 发表日期：

    2025年4月19日

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  • Liyong Guo,
  • Xiaojie Yin,
  • Yuanda Wu,
  • Yue Wang,
  • Liangliang Wang,
  • Jiashun Zhang,
  • Pengwei Cui,
  • Junchi Ma,
  • Chunxue Zhang,
  • Song Huang,
  • Hanming Yang,
  • Junming An

摘要

The SiN waveguide process fabricated on the SOI platform enables the integration of passive optical functions with active functionalities on the same platform. In this study, two SiN-based Arrayed Waveguide Gratings (AWGs) were designed and fabricated: one serving as a wavelength multiplexer (MUX) and the other as a demultiplexer (DeMUX) for Coarse Wavelength Division Multiplexing systems. Experimental results demonstrate that the insertion losses of the fabricated AWG MUX and DeMUX are less than 4.31 dB for the MUX and 2.13 dB for the DeMUX, with channel crosstalk values of less than −17.08 dB and −26.34 dB, respectively. The 3 dB bandwidth of the MUX exceeds 11 nm, while that of the DeMUX surpasses 6.4 nm. Additionally, the central wavelength of the AWG exhibits a linear shift in response to temperature changes. After transmitting a 26.5625 Gbaud NRZ and 53.125 Gb/s PAM4 signal, a clear eye diagram is maintained, demonstrating the potential of these modulation formats for high-performance optical communication systems.