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<p>As next-generation semiconductor manufacturing processes become increasingly sophisticated, the requirements for precision and cleanliness in wafer handling systems have become more stringent. Magnetic levitation (Maglev) technology is emerging as a promising alternative, offering contactless transport that inherently suppresses mechanical friction and particle generation. However, under harsh operating conditions, characterized by high speed and acceleration, Maglev control stability is challenged by external disturbances. To address these challenges, this study proposes a dual disturbance compensation control architecture and experimentally validates its effectiveness using a Maglev wafer handling robot system. The proposed architecture integrates two complementary control strategies: (i) an acceleration feedforward (AFF) controller that directly compensates for structured disturbances induced by the thrust force of a linear synchronous motor (LSM), and (ii) a disturbance observer (DOB) that indirectly attenuates unstructured disturbances such as the LSM-induced normal force and dynamic reactions from multi-joint robotic arms. The experimental results show that the proposed approach reduces airgap fluctuations by up to 80.4<InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(\%\)</EquationSource> </InlineEquation> along the <i>y</i>-axis and improves angular stability by up to 82.7<InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(\%\)</EquationSource> </InlineEquation> in the yaw direction, compared to conventional feedback control. The AFF controller effectively mitigates high-frequency pitch and yaw disturbances. In parallel, the DOB enhances control robustness against unmodeled dynamics and external uncertainties. Overall, this research presents a practical control framework suited to the high-precision and high-cleanliness demands of advanced semiconductor manufacturing environments.</p>

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Robust Airgap Stabilization of a Magnetic Levitation Wafer Handling Robot Under Harsh Operating Conditions via Acceleration Feedforward and Disturbance Observer

  • 期刊论文

  • 发表日期：

    2025年11月26日

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  • Chang-Wan Ha

摘要

As next-generation semiconductor manufacturing processes become increasingly sophisticated, the requirements for precision and cleanliness in wafer handling systems have become more stringent. Magnetic levitation (Maglev) technology is emerging as a promising alternative, offering contactless transport that inherently suppresses mechanical friction and particle generation. However, under harsh operating conditions, characterized by high speed and acceleration, Maglev control stability is challenged by external disturbances. To address these challenges, this study proposes a dual disturbance compensation control architecture and experimentally validates its effectiveness using a Maglev wafer handling robot system. The proposed architecture integrates two complementary control strategies: (i) an acceleration feedforward (AFF) controller that directly compensates for structured disturbances induced by the thrust force of a linear synchronous motor (LSM), and (ii) a disturbance observer (DOB) that indirectly attenuates unstructured disturbances such as the LSM-induced normal force and dynamic reactions from multi-joint robotic arms. The experimental results show that the proposed approach reduces airgap fluctuations by up to 80.4 \(\%\) along the y-axis and improves angular stability by up to 82.7 \(\%\) in the yaw direction, compared to conventional feedback control. The AFF controller effectively mitigates high-frequency pitch and yaw disturbances. In parallel, the DOB enhances control robustness against unmodeled dynamics and external uncertainties. Overall, this research presents a practical control framework suited to the high-precision and high-cleanliness demands of advanced semiconductor manufacturing environments.