<p>The growing demand for motion stages in industries, such as display panels and semiconductor manufacturing, requires both rapid response and high precision. Vibrations of the system base caused by large reaction forces during rapid acceleration and deceleration adversely affect the production quality and reduce the equipment lifespan. Given the effectiveness of passive reaction force compensation (RFC) mechanisms in mitigating base vibrations, this study seeks to advance research by proposing an optimized design framework that addresses existing limitations. First, the RFC mechanism for the linear motor motion stage was modeled and investigated using tuned mass damper (TMD) theory. We conducted a mathematical analysis of the frequency components of the motion profile to identify key excitation sources. The new design method approximately determines the stiffness and damping of the RFC mechanism to minimize the lateral vibration of the base by considering the frequency components of the motion profile and the dynamics of both the RFC mechanism and system base. To demonstrate its applicability, the proposed RFC design method was applied to two scenarios: an RFC linear motor motion stage with an undamped or damped system base. Finally, the design results were validated through multibody dynamic simulations of both the 2 and 5-DOF models of the RFC linear motor motion stages. For the damped system, the errors of the optimal frequency and damping ratio were found to be 21.0% and 29.5%, respectively, which demonstrates that the proposed design method can provide the initial design parameters for an RFC mechanism without complex multibody dynamic simulations.</p>