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<p>This paper presents a planar electromagnetic actuation-based nanopositioner with an integrated magnetic negative stiffness system. The proposed nanopositioner enables the achievement of a large range, high positioning speed, and multi-axis in-plane actuation without affecting the achievable actuation gain. The positioner comprises an array of conductive meanders suspended by conductive-compliant elements over a checkerboard of permanent magnets. The magnetic negative stiffness greatly reduces the stiffness along the actuation directions. Theoretical models are proposed for the estimation of magnetic force, magnetic stiffness and for the dynamic response of the positioner. The theoretical values are shown to agree with the finite element analysis results within 4.3%. The proposed two-axis positioner is fabricated and shown to track references accurately, with a cross-axis motion of about 1%. The negative stiffness system is shown to improve the actuation range by a factor of 5.6 times. The proposed positioner achieves a range of 969&#xa0;μm. The positioner’s two-axis positioning capabilities are experimentally demonstrated by tracking several standard and arbitrary planar reference curves. The nanopositioning capability of the positioner is demonstrated by tracking a 22&#xa0;nm step staircase signal with RMS noise 2.91&#xa0;nm.</p>

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Design and development of a planar nanopositioning system with magnetic actuation

  • 期刊论文

  • 发表日期：

    2025年9月9日

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  • R. Krishna,
  • G. R. Jayanth

摘要

This paper presents a planar electromagnetic actuation-based nanopositioner with an integrated magnetic negative stiffness system. The proposed nanopositioner enables the achievement of a large range, high positioning speed, and multi-axis in-plane actuation without affecting the achievable actuation gain. The positioner comprises an array of conductive meanders suspended by conductive-compliant elements over a checkerboard of permanent magnets. The magnetic negative stiffness greatly reduces the stiffness along the actuation directions. Theoretical models are proposed for the estimation of magnetic force, magnetic stiffness and for the dynamic response of the positioner. The theoretical values are shown to agree with the finite element analysis results within 4.3%. The proposed two-axis positioner is fabricated and shown to track references accurately, with a cross-axis motion of about 1%. The negative stiffness system is shown to improve the actuation range by a factor of 5.6 times. The proposed positioner achieves a range of 969 μm. The positioner’s two-axis positioning capabilities are experimentally demonstrated by tracking several standard and arbitrary planar reference curves. The nanopositioning capability of the positioner is demonstrated by tracking a 22 nm step staircase signal with RMS noise 2.91 nm.