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<p>This paper reports on thermally switchable tethers that control the rapid release of strained microhooks from silicon substrates. Applications include automated microassembly of electronic circuits using clips that grasp microscale (&lt; 200 micron diameter) conductive fibers, as well as assembly of microdevices onto heat-sensitive materials by grasping. We developed an integrated, photoresist-based thermal release structure that allows the first direct observations of the release process outside the etch chamber. High speed camera video (4200 frames/s) shows the cantilevers release in an order determined by thermal diffusion, with groups of ~ 1200 micron long cantilevers releasable at 100 Hz. Side-view video is analyzed to show that the height of the graspable region is approximately half the hook length. The thermally isolated release method prevents the microhooks from heating, making it potentially useful for grasping heat-sensitive polymeric and biological materials.</p>

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Thermally switchable tethers for rapid release of strained microstructures

  • 期刊论文

  • 发表日期：

    2025年2月5日

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  • Jasmin Beharic,
  • Cindy Harnett

摘要

This paper reports on thermally switchable tethers that control the rapid release of strained microhooks from silicon substrates. Applications include automated microassembly of electronic circuits using clips that grasp microscale (< 200 micron diameter) conductive fibers, as well as assembly of microdevices onto heat-sensitive materials by grasping. We developed an integrated, photoresist-based thermal release structure that allows the first direct observations of the release process outside the etch chamber. High speed camera video (4200 frames/s) shows the cantilevers release in an order determined by thermal diffusion, with groups of ~ 1200 micron long cantilevers releasable at 100 Hz. Side-view video is analyzed to show that the height of the graspable region is approximately half the hook length. The thermally isolated release method prevents the microhooks from heating, making it potentially useful for grasping heat-sensitive polymeric and biological materials.