<p>In response to the insufficient research on the relationship between the surperfinishing process of raceway in silicon nitride full ceramic ball bearings and temperature rise in highend applications, this paper investigates the effects of surperfinishing process parameters on raceway surface roughness and the mechanism by which roughness affects temperature rise, using a combination of experimental and theoretical analysis methods. The experiments revealed that the influence of surperfinishing time, pressure, tangential speed, long-stroke oscillation frequency, and short-stroke vibration frequency on surface roughness decreases in that order. Based on the experimental results, an optimal superfinishing parameter combination was determined, which achieved a 90.8 % improvement in raceway surface roughness. Additionally, a temperature rise calculation model considering surface roughness was established, and the experimental validation of the surface showed that the maximum error was 7.82 % and the minimum error was 2.76 %. The conclusion was drawn that the greater the raceway roughness, the higher the temperature rise of the bearing. The above results have important theoretical and practical application value for optimizing the manufacturing process of Si₃N₄ ceramic bearings and improving processing quality and performance.</p>