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<p>To understand the ultrasonic-assisted chemical mechanical polishing (UACMP) method more comprehensively, this paper carries out an in-depth study of the abrasive grain motion characteristics in UACMP. Firstly, the contact model between the workpiece-abrasive grain-polishing pad was established. Secondly, the trajectory change law of embedded abrasive grains and free abrasive grains under the action of ultrasonic was explored respectively, and it was found that the amplitude and frequency of abrasive grains’ motion increased with the increase of ultrasonic amplitude and ultrasonic frequency respectively. Meanwhile, it was found that the embedded abrasive grain’s trajectory uniformity was significantly improved by tiny adjustments in the rotational rotational speed ratio. Finally, the experimental verification of the above findings was carried out on YG8 cemented carbide inserts; the experiments showed that the enhancement of the ultrasonic action and the fine-tuning of the rotational speed ratio had a significant effect on the improvement of the surface quality of the workpieces, and the experimental results were consistent with the theoretical analyses; the theoretical basis of the UACMP method has been improved.</p>

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Study of abrasive grain motion characteristics in ultrasonic-assisted chemical mechanical polishing process

  • 期刊论文

  • 发表日期：

    2025年11月3日

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  • Yangyang Zhang,
  • Yingshuai Wang,
  • Yujie Yuan,
  • Xiaojing Li,
  • Jiarun Xie,
  • Xiaofeng Liu,
  • Mengmeng Liu,
  • Yuanyuan Cui

摘要

To understand the ultrasonic-assisted chemical mechanical polishing (UACMP) method more comprehensively, this paper carries out an in-depth study of the abrasive grain motion characteristics in UACMP. Firstly, the contact model between the workpiece-abrasive grain-polishing pad was established. Secondly, the trajectory change law of embedded abrasive grains and free abrasive grains under the action of ultrasonic was explored respectively, and it was found that the amplitude and frequency of abrasive grains’ motion increased with the increase of ultrasonic amplitude and ultrasonic frequency respectively. Meanwhile, it was found that the embedded abrasive grain’s trajectory uniformity was significantly improved by tiny adjustments in the rotational rotational speed ratio. Finally, the experimental verification of the above findings was carried out on YG8 cemented carbide inserts; the experiments showed that the enhancement of the ultrasonic action and the fine-tuning of the rotational speed ratio had a significant effect on the improvement of the surface quality of the workpieces, and the experimental results were consistent with the theoretical analyses; the theoretical basis of the UACMP method has been improved.