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<p>This study presents the development of a 3-DOF fine stage system for high-precision machining incorporating real-time error compensation. The system employs a symmetric structure with four piezoelectric actuators and distributed circular notch flexure hinges, resulting in a first natural frequency of 2507 Hz. Through a 10 ms control loop implementation, the system achieved error reductions in quasi-static conditions: vertical straightness error from 0.952 µm to 0.113 µm, roll error from 6.28 µrad to 0.484 µrad, and pitch error from 18.8 µrad to 0.554 µrad. Dynamic testing at 50 mm/min feed rate demonstrated peak-to-valley errors of 0.422 µm, 1.52 µrad, and 2.18 µrad for vertical straightness, roll, and pitch errors, respectively. Integration into a micro-milling system resulted in surface quality improvements with Ra decreasing from 0.503 µm to 0.155 µm and Rz from 5.07 µm to 1.47 µm. The system’s performance was evaluated through finite element analysis, quasi-static testing, dynamic testing, and practical machining experiments to verify its effectiveness in precision machining applications.</p>

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Development and performance assessment of a 3-DOF fine-stage for high-precision machining with error compensation

  • 期刊论文

  • 发表日期：

    2025年9月2日

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  • Jaeseong Choi,
  • Hwa Young Kim

摘要

This study presents the development of a 3-DOF fine stage system for high-precision machining incorporating real-time error compensation. The system employs a symmetric structure with four piezoelectric actuators and distributed circular notch flexure hinges, resulting in a first natural frequency of 2507 Hz. Through a 10 ms control loop implementation, the system achieved error reductions in quasi-static conditions: vertical straightness error from 0.952 µm to 0.113 µm, roll error from 6.28 µrad to 0.484 µrad, and pitch error from 18.8 µrad to 0.554 µrad. Dynamic testing at 50 mm/min feed rate demonstrated peak-to-valley errors of 0.422 µm, 1.52 µrad, and 2.18 µrad for vertical straightness, roll, and pitch errors, respectively. Integration into a micro-milling system resulted in surface quality improvements with Ra decreasing from 0.503 µm to 0.155 µm and Rz from 5.07 µm to 1.47 µm. The system’s performance was evaluated through finite element analysis, quasi-static testing, dynamic testing, and practical machining experiments to verify its effectiveness in precision machining applications.