<p>In this study, an analysis system was developed for baking insulation materials at high temperatures. The residual gas analysis system and furnace were included in the whole system in addition to the vacuum exhaust system at a high level of 1×10⁻⁶ torr or less, in order to accurately measure the component of outgassing for vacuum-insulation materials. Experimental investigations are sequentially conducted to measure and evaluate the outgassing components of the insulation materials based on the baking temperature using a residual-gas analysis system. Various materials used for insulation, such as steel use stainless (SUS) tubes, multilayer insulation (MLI), fiber-reinforced plastics (FRPs), and aluminum (Al) tape, are baked at high temperatures. The types of outgasses generated depending on temperature are analyzed experimentally. Hydrogen, water, nitrogen, and carbon dioxide are discovered to be the main components of residual gas for the insulation materials, except for Al tape. The vacuum pressures for the MLI and FRP changed rapidly with respect to the baking temperature compared with those for the aluminum tape. The vacuum level is governed by the baking temperature, and the effect of bakeout on the performance of vacuum insulation is determined by the insulation material used in the residual-gas analysis system.</p>