<p>This study primarily demonstrates the feasibility of using aerosol deposition to produce thin GaN coatings through systematic investigation. To date, the roles of particle size and powder morphology in the consolidation of ceramic particles during aerosol deposition remain unclear. To enhance understanding of this process, two GaN powders, one coarse agglomerated and the other a fine monolithic powder, were deposited under various process conditions. The findings revealed that fine GaN powder is more effective in forming denser coating layers as compared to agglomerated GaN powder. Furthermore, the use of helium gas at higher pressures was observed to enhance coating formation in comparison with nitrogen gas. This study not only validates the potential of aerosol deposition for forming thin GaN coatings but also contributes to our understanding of the critical role that particle sizes play in the aerosol deposition process.</p>

错误:搜索内容不能为空,请输入英文关键词
错误:关键词超出字数限制,请精简
高级检索

Development of Gallium Nitride Coating via Aerosol Deposition

  • Shaoyun Zhou,
  • Andreas Elsenberg,
  • Chunjie Huang,
  • Camilla Schulze,
  • Frank Gaertner,
  • Kazuhiro Ogawa,
  • Thomas Klassen

摘要

This study primarily demonstrates the feasibility of using aerosol deposition to produce thin GaN coatings through systematic investigation. To date, the roles of particle size and powder morphology in the consolidation of ceramic particles during aerosol deposition remain unclear. To enhance understanding of this process, two GaN powders, one coarse agglomerated and the other a fine monolithic powder, were deposited under various process conditions. The findings revealed that fine GaN powder is more effective in forming denser coating layers as compared to agglomerated GaN powder. Furthermore, the use of helium gas at higher pressures was observed to enhance coating formation in comparison with nitrogen gas. This study not only validates the potential of aerosol deposition for forming thin GaN coatings but also contributes to our understanding of the critical role that particle sizes play in the aerosol deposition process.