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<p>To enhance the properties of metallic components, a new hybrid surface engineering approach was investigated. A thin titanium layer was first deposited on pure iron and 316L stainless steel by direct current (DC) magnetron sputtering and subsequently nitrided. The nitriding treatment was performed under low-pressure pure nitrogen. The structural evolution of the treated samples was characterized by scanning electron microscopy (SEM), x-ray diffraction (XRD) and energy-dispersive spectroscopy (EDS) with particular attention to diffusion kinetics and phase formation at the interface. Mechanical performances of the hybrid-treated substrates were assessed by nanoindentation. The diffusion mechanism that occurred during the nitriding process was analyzed and explained. The Ti coating was successfully nitrided to form a TiN layer at the top of both substrates with a hardness of 11.2&#xa0;GPa.</p>

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Efficient Synthesis of Titanium Nitride Coatings on Stainless Steel via Gas Nitriding of Sputtered Titanium

  • 期刊论文

  • 发表日期：

    2026年7月23日

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  • Loïc Chossemier,
  • Dominique Cotton,
  • Corinne Nouveau,
  • Maria-Rosa Ardigo-Besnard,
  • Frédéric Bernard,
  • Florian Bussiere,
  • Yoann Pinot,
  • Romaric Masset,
  • Gaya Chettouh,
  • Mohamed El Garah,
  • Soufyane Achache,
  • Bruno Guelorget,
  • Manuel Francois

摘要

To enhance the properties of metallic components, a new hybrid surface engineering approach was investigated. A thin titanium layer was first deposited on pure iron and 316L stainless steel by direct current (DC) magnetron sputtering and subsequently nitrided. The nitriding treatment was performed under low-pressure pure nitrogen. The structural evolution of the treated samples was characterized by scanning electron microscopy (SEM), x-ray diffraction (XRD) and energy-dispersive spectroscopy (EDS) with particular attention to diffusion kinetics and phase formation at the interface. Mechanical performances of the hybrid-treated substrates were assessed by nanoindentation. The diffusion mechanism that occurred during the nitriding process was analyzed and explained. The Ti coating was successfully nitrided to form a TiN layer at the top of both substrates with a hardness of 11.2 GPa.