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<p>This study systematically investigates the structural evolution and performance response of AlCrN coatings deposited by high-power pulsed magnetron sputtering (HiPIMS) after vacuum annealing at 700-1000&#xa0;°C. The elemental composition remained stable during annealing, with an Al/(Al + Cr) ratio of approximately 0.68 and negligible nitrogen loss, while surface roughness increased markedly at 1000&#xa0;°C. The hardness exhibited an overall decreasing trend from 35.6&#xa0;GPa at 700&#xa0;°C to 31.5&#xa0;GPa at 1000&#xa0;°C, reaching a minimum of 30.6&#xa0;GPa at 800&#xa0;°C, mainly due to stress relaxation and microstructural evolution. Tribological behavior showed a nonlinear dependence on annealing temperature. The coating annealed at 800&#xa0;°C demonstrated the lowest wear rate (1.70 × 10<sup>− 7</sup>&#xa0;mm<sup>3</sup>/N·m), corresponding to higher H/E and H<sup>3</sup>/E<sup>2</sup> ratios, whereas the 900&#xa0;°C treated coating exhibited the lowest friction coefficient (0.78). Notably, annealing at 1000&#xa0;°C improved adhesion strength to 60&#xa0;N, indicating excellent thermal stability. These findings confirm the superior high-temperature stability of HiPIMS-fabricated AlCrN coatings and demonstrate that annealing temperature is an effective parameter for tailoring coating structure and performance.</p>

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Microstructure and Mechanical Properties of AlCrN Coatings Prepared by HiPIMS Technique: Effect of Vacuum Annealing Temperature

  • 期刊论文

  • 发表日期：

    2026年3月12日

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  • Shuai Liu,
  • Qingye Wang,
  • Ji Cheng Ding,
  • Lijie Guo,
  • Ziyang Zhang,
  • Jun Zheng

摘要

This study systematically investigates the structural evolution and performance response of AlCrN coatings deposited by high-power pulsed magnetron sputtering (HiPIMS) after vacuum annealing at 700-1000 °C. The elemental composition remained stable during annealing, with an Al/(Al + Cr) ratio of approximately 0.68 and negligible nitrogen loss, while surface roughness increased markedly at 1000 °C. The hardness exhibited an overall decreasing trend from 35.6 GPa at 700 °C to 31.5 GPa at 1000 °C, reaching a minimum of 30.6 GPa at 800 °C, mainly due to stress relaxation and microstructural evolution. Tribological behavior showed a nonlinear dependence on annealing temperature. The coating annealed at 800 °C demonstrated the lowest wear rate (1.70 × 10− 7 mm3/N·m), corresponding to higher H/E and H3/E2 ratios, whereas the 900 °C treated coating exhibited the lowest friction coefficient (0.78). Notably, annealing at 1000 °C improved adhesion strength to 60 N, indicating excellent thermal stability. These findings confirm the superior high-temperature stability of HiPIMS-fabricated AlCrN coatings and demonstrate that annealing temperature is an effective parameter for tailoring coating structure and performance.