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<p>Suitable interface elements are crucial for enhancing the performance of biological dry electrodes. In this study, we focus on researching CrN-based films with good biocompatibility, which were deposited on glass substrates using the unbalanced magnetron sputtering technique. The CrSiCN films exhibited a structure combining nanocrystals of Cr(C,N) with an amorphous phase of a-Si<sub>3</sub>N<sub>4</sub>, a-SiCN, and a-C/a-CN. The films exhibited typical columnar crystal structures when deposited at a 0&#xa0;V bias. Specifically, the CrSiCN-3# film with a typical columnar crystal structure presented reduced contact impedance (Z<sub>1</sub>Hz = 195.4&#xa0;kΩ). However, it showed decreased corrosion resistance, characterized by a higher current density of 1.83 × 10<sup>−6</sup>&#xa0;A&#xa0;cm<sup>−2</sup> and lower resistivity of 2.59 × 10<sup>4</sup>&#xa0;Ω&#xa0;cm<sup>2</sup>. The CrSiCN dry electrodes can collect complete QRS complexes, with higher R-wave and T-wave amplitudes compared to Ag/AgCl wet electrodes. The signal-to-noise ratio (SNR) of ECG signals acquired using CrSiCN films ranged from 61.3 to 64.5&#xa0;dB, surpassing that of Ag/AgCl electrodes (60.0&#xa0;dB), indicating their potential application as biological dry electrodes.</p>

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Influence of Deposition Bias on the Structure and Electrical Properties of CrSiCN Film as ECG Dry Bioelectrodes

  • 期刊论文

  • 发表日期：

    2026年1月26日

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  • Zhiwei Wu,
  • Sirui Zhao,
  • Tao Zhou

摘要

Suitable interface elements are crucial for enhancing the performance of biological dry electrodes. In this study, we focus on researching CrN-based films with good biocompatibility, which were deposited on glass substrates using the unbalanced magnetron sputtering technique. The CrSiCN films exhibited a structure combining nanocrystals of Cr(C,N) with an amorphous phase of a-Si3N4, a-SiCN, and a-C/a-CN. The films exhibited typical columnar crystal structures when deposited at a 0 V bias. Specifically, the CrSiCN-3# film with a typical columnar crystal structure presented reduced contact impedance (Z1Hz = 195.4 kΩ). However, it showed decreased corrosion resistance, characterized by a higher current density of 1.83 × 10−6 A cm−2 and lower resistivity of 2.59 × 104 Ω cm2. The CrSiCN dry electrodes can collect complete QRS complexes, with higher R-wave and T-wave amplitudes compared to Ag/AgCl wet electrodes. The signal-to-noise ratio (SNR) of ECG signals acquired using CrSiCN films ranged from 61.3 to 64.5 dB, surpassing that of Ag/AgCl electrodes (60.0 dB), indicating their potential application as biological dry electrodes.