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<p>Silicon carbide (SiC) is a semiconductor compound with superior properties to replace silicon (Si) in the semiconductor field. Therefore, the requirement for a flat, smooth, and nanometer-scale SiC surface after machining is highly urgent. In this study, a magnetorheological finishing process combined with shear thickening fluids (STFs) and a uniformly distributed magnetic yoke with gaps for SiC materials is proposed. The authors clarify the method of creating a new magnetorheological finishing fluid from STFs and the material removal mechanism of the proposed process. The method of applying magnetic fields with a uniformly distributed magnetic yoke with gaps is carefully examined and analyzed using the finite element method. An experimental setup was also established to investigate the effectiveness of the proposed process on SiC, as well as to evaluate the influence of process parameters such as STF concentration of liquid, working gap, magnet speed, and the influence of workpiece velocity on surface roughness. A flat and smooth SiC surface with a roughness of Ra = 1&#xa0;nm after 90 mins of finishing demonstrates the high efficiency of the proposed process in improving the smoothness of SiC surfaces. The behavior of the material removal mechanism was also examined and analyzed by evaluating the polishing pressure, material removal rate, and the ability of the proposed method to form a surface reaction layer.</p>

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Investigation of the Effectiveness of Shear Thickening Fluids with Uniformly Distributed Magnetic Yoke and Gap in the Surface Finishing Process for Silicon Carbide Material

  • 期刊论文

  • 发表日期：

    2025年11月3日

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  • Dung Hoang Tien,
  • Pham Thi Thieu Thoa,
  • Nguyen Duy Trinh

摘要

Silicon carbide (SiC) is a semiconductor compound with superior properties to replace silicon (Si) in the semiconductor field. Therefore, the requirement for a flat, smooth, and nanometer-scale SiC surface after machining is highly urgent. In this study, a magnetorheological finishing process combined with shear thickening fluids (STFs) and a uniformly distributed magnetic yoke with gaps for SiC materials is proposed. The authors clarify the method of creating a new magnetorheological finishing fluid from STFs and the material removal mechanism of the proposed process. The method of applying magnetic fields with a uniformly distributed magnetic yoke with gaps is carefully examined and analyzed using the finite element method. An experimental setup was also established to investigate the effectiveness of the proposed process on SiC, as well as to evaluate the influence of process parameters such as STF concentration of liquid, working gap, magnet speed, and the influence of workpiece velocity on surface roughness. A flat and smooth SiC surface with a roughness of Ra = 1 nm after 90 mins of finishing demonstrates the high efficiency of the proposed process in improving the smoothness of SiC surfaces. The behavior of the material removal mechanism was also examined and analyzed by evaluating the polishing pressure, material removal rate, and the ability of the proposed method to form a surface reaction layer.