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<p>In this study, AlCoCrFeNi/Al<sub>2</sub>O<sub>3</sub> multilayer composite films were deposited on 304 stainless steels (304SS) and silicon substrates by magnetron sputtering. The effects of Al<sub>2</sub>O<sub>3</sub> layer thickness on the microstructure and properties of AlCoCrFeNi/Al<sub>2</sub>O<sub>3</sub> nano-multilayer films were investigated. The results showed that AlCoCrFeNi film demonstrated a biphasic crystalline architecture comprising both FCC and BCC lattices. Following Al<sub>2</sub>O<sub>3</sub> introduction, discernible peak broadening in diffraction patterns pointed toward microstructure evolution involving diminished crystallite dimensions and amorphous phase formation. The mean cluster size decreased from 86.75 (t<sub>Al2O3</sub>=10 nm) to 55 nm (t<sub>Al2O3</sub>=30 nm) with increasing thickness of the Al<sub>2</sub>O<sub>3</sub> layer. When t<sub>Al2O3</sub>=10 nm, the hardness (H) and elastic modulus (E) of the multilayer composite films reached the maximum values of 9.21 and 178.8 GPa, respectively. However, with the increase of Al<sub>2</sub>O<sub>3</sub> layer thickness (&gt;10 nm), the mechanical properties decrease. Meanwhile, the corrosion resistance was greatly improved with the increasing Al<sub>2</sub>O<sub>3</sub> thickness. When the thickness was 30 nm, the corrosion potential and corrosion current density reached −0.131 V and 2.41 μA/cm<sup>2</sup>. This study provides a reference for making high-entropy multilayer films with better performance.</p>

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Microstructure, Mechanical and Corrosion Properties of Magnetron Sputtered AlCoCrFeNi/Al2O3 Nano-multilayer Films

  • 期刊论文

  • 发表日期：

    2025年9月15日

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  • Feng Wang,
  • Senlong He,
  • Hanlong Zhang,
  • Hongshu Jin,
  • Zhiying Lv,
  • Fanyong Zhang

摘要

In this study, AlCoCrFeNi/Al2O3 multilayer composite films were deposited on 304 stainless steels (304SS) and silicon substrates by magnetron sputtering. The effects of Al2O3 layer thickness on the microstructure and properties of AlCoCrFeNi/Al2O3 nano-multilayer films were investigated. The results showed that AlCoCrFeNi film demonstrated a biphasic crystalline architecture comprising both FCC and BCC lattices. Following Al2O3 introduction, discernible peak broadening in diffraction patterns pointed toward microstructure evolution involving diminished crystallite dimensions and amorphous phase formation. The mean cluster size decreased from 86.75 (tAl2O3=10 nm) to 55 nm (tAl2O3=30 nm) with increasing thickness of the Al2O3 layer. When tAl2O3=10 nm, the hardness (H) and elastic modulus (E) of the multilayer composite films reached the maximum values of 9.21 and 178.8 GPa, respectively. However, with the increase of Al2O3 layer thickness (>10 nm), the mechanical properties decrease. Meanwhile, the corrosion resistance was greatly improved with the increasing Al2O3 thickness. When the thickness was 30 nm, the corrosion potential and corrosion current density reached −0.131 V and 2.41 μA/cm2. This study provides a reference for making high-entropy multilayer films with better performance.