Broadband TiN Metasurface Absorber: Design and Equivalent Circuit Analysis
摘要
A high-performance metasurface absorber is developed using a stadium-type graphene–titanium nitride cavity. The configuration is defined as metal–dielectric–metal, with titanium nitride being used as both the resonator and reflective substrate, and graphene being employed to facilitate optical tunability and field interaction. An equivalent circuit model is established for analytical analysis to describe impedance behavior and assist in structural optimization. Geometric parameters are designed with a hybrid optimization algorithm with global swarm search and local gradients in absorptance. The optimal single-cavity design demonstrates average absorptance of 92% over a range of 300–1000 nm. A dual-stadium arrangement is used to enhance flatness over spectra by facilitating several hybrid modes through inter-cavity coupling. Material investigation is conducted to demonstrate that titanium nitride is superior to traditional metals due to improved thermal stability, complementary metal–oxide–semiconductor (CMOS) integration, and plasmonic excellence. The introduced design is presented as a compact, scalable, and thermal-resistant platform for broadband absorption with potential applications in photodetection, thermoplasmonics, and sunlight capture.