Fabrication and Optimization of Chemically Processed Zn-Sn-O TFTs with ITO Electrodes for pH Sensing
摘要
This study reports the fabrication and characterization of zinc tin oxide (ZTO) thin-film transistor (TFT)-based pH sensors featuring an extended indium tin oxide (ITO) gate electrode. Utilizing scalable and cost-effective spin-coating deposition methods, we optimized the annealing temperature and duration to enhance the electrical performance of ZTO TFTs, resulting in increased mobility and stable transfer characteristics. The developed pH sensor demonstrated a linear and positive shift in threshold voltage with rising pH levels, achieving an impressive sensitivity of 94 mV/pH and an R2 value of 0.99, underscoring its reliable pH-sensing capabilities. In addition, time-resolved measurements of the drain-source current at a constant gate-source voltage of 1 V validated the pH-dependent response, revealing a consistent decrease in current with increasing pH. The adoption of chemical solution deposition techniques highlights the scalability and cost-efficiency of the fabrication process, paving the way for integrating ZTO TFT-based pH sensors into enzymatic biosensors for home-diagnostic applications