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<p>A multispectral filter array (MSFA) based on the Fabry–Pérot cavity with low-sideband performance and compact design in the near-infrared band is proposed. A thin layer of metal platinum (Pt) was added into the resonant cavity, suppressing the odd-order resonances to improve the selectivity. The dielectric grating metasurfaces were embedded in the cavity to achieve the tuning of the transmission peak by adjusting the width to change the duty cycle. A consistent profile of MSFA was completed based on width adjustment to improve compactness and reduce the fabrication steps. TiO<sub>2</sub> and SiO<sub>2</sub> have been used to form the distributed Bragg reflectors as highly reflective mirrors for MSFA to achieve high transmittance and narrow linewidth, improving the spectral resolution. The simulated tuning range of the MSFA is from 885&#xa0;nm to 1171&#xa0;nm, with a full width at half-maximum (FWHM) ranging from 6&#xa0;nm to 24&#xa0;nm, an average transmittance of over 94%, and the sideband transmittance ranging from 3% to 15%. The proposed compact Fabry–Pérot MSFA is easy to fabricate, with high spectral selectivity and transmittance within the tuning range. It can be applied to integrated multi-band spectral imaging systems.</p>

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Design of a Compact Fabry–Pérot Multispectral Filter Array with Low-Sideband Performance

  • 期刊论文

  • 发表日期：

    2025年3月24日

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  • Tiantian Tang,
  • Zhiwei Li,
  • Fushen Cao,
  • Yile Zhang,
  • Tingting Ding

摘要

A multispectral filter array (MSFA) based on the Fabry–Pérot cavity with low-sideband performance and compact design in the near-infrared band is proposed. A thin layer of metal platinum (Pt) was added into the resonant cavity, suppressing the odd-order resonances to improve the selectivity. The dielectric grating metasurfaces were embedded in the cavity to achieve the tuning of the transmission peak by adjusting the width to change the duty cycle. A consistent profile of MSFA was completed based on width adjustment to improve compactness and reduce the fabrication steps. TiO2 and SiO2 have been used to form the distributed Bragg reflectors as highly reflective mirrors for MSFA to achieve high transmittance and narrow linewidth, improving the spectral resolution. The simulated tuning range of the MSFA is from 885 nm to 1171 nm, with a full width at half-maximum (FWHM) ranging from 6 nm to 24 nm, an average transmittance of over 94%, and the sideband transmittance ranging from 3% to 15%. The proposed compact Fabry–Pérot MSFA is easy to fabricate, with high spectral selectivity and transmittance within the tuning range. It can be applied to integrated multi-band spectral imaging systems.