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<p>Laser etching and laser chemical vapor deposition (LCVD) techniques were proposed for the rapid preparation of high-purity, strongly bonded SiC porous micro-nano-coatings on quartz substrates. The laser serves as an external driving force for the vertical growth of SiC whiskers, facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world. The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress. It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.</p>

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Fabrication of Porous SiC Coatings on Quartz Substrates by Laser Chemical Vapor Deposition

  • 期刊论文

  • 发表日期：

    2025年4月14日

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  • Meijun Yang,
  • Rui Chen,
  • Qingfang Xu,
  • Bingjian Guo,
  • Kai Liu,
  • Rong Tu,
  • Song Zhang

摘要

Laser etching and laser chemical vapor deposition (LCVD) techniques were proposed for the rapid preparation of high-purity, strongly bonded SiC porous micro-nano-coatings on quartz substrates. The laser serves as an external driving force for the vertical growth of SiC whiskers, facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world. The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress. It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.