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<p>This research investigates the structural, electrical, and optical properties of sputtered ZnO/Ag bilayer thin films for transparent conductive oxide (TCO) applications with an emphasis on post-deposition thermal annealing in the 300–500&#xa0;°C range. X-ray diffraction (XRD) analysis reveals enhanced crystallinity and enhanced preferred (002) orientation of the ZnO phase at higher annealing temperatures, without the formation of intermetallic phases; however, weak peaks corresponding to metallic Ag nanoparticles are observed, proving their presence and morphological transformation upon annealing. Optical measurements show a characteristic localized surface plasmon resonance (LSPR) peak at around 520&#xa0;nm at lower annealing temperatures that diminishes at higher temperatures due to nanoparticle redistribution and coarsening, followed by degradation through diffusion or oxidation. This results in significantly increased transmittance in the visible to near-infrared range. Electrical characterization indicates that the optimum annealing window is 400–450&#xa0;°C, where a trade-off between good optical transparency and low sheet resistance is achieved. Annealing at temperatures greater than 500&#xa0;°C is found to be detrimental to conductivity due to Ag diffusion and oxidation. The tunable optical and electrical properties position ZnO/Ag bilayers as a suitable, low-cost alternative to commercial ITO films for emerging tailored flexible and transparent optoelectronic and photovoltaic devices.</p>

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Engineering Structural, Electrical, and Optical Properties of RF-sputtered ZnO/Ag Transparent Electrodes Via Thermal Annealing

  • 期刊论文

  • 发表日期：

    2025年11月7日

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  • R. Nezzar,
  • K. Kacha,
  • F. Djeffal,
  • A. Benhaya,
  • A. Bendjerad

摘要

This research investigates the structural, electrical, and optical properties of sputtered ZnO/Ag bilayer thin films for transparent conductive oxide (TCO) applications with an emphasis on post-deposition thermal annealing in the 300–500 °C range. X-ray diffraction (XRD) analysis reveals enhanced crystallinity and enhanced preferred (002) orientation of the ZnO phase at higher annealing temperatures, without the formation of intermetallic phases; however, weak peaks corresponding to metallic Ag nanoparticles are observed, proving their presence and morphological transformation upon annealing. Optical measurements show a characteristic localized surface plasmon resonance (LSPR) peak at around 520 nm at lower annealing temperatures that diminishes at higher temperatures due to nanoparticle redistribution and coarsening, followed by degradation through diffusion or oxidation. This results in significantly increased transmittance in the visible to near-infrared range. Electrical characterization indicates that the optimum annealing window is 400–450 °C, where a trade-off between good optical transparency and low sheet resistance is achieved. Annealing at temperatures greater than 500 °C is found to be detrimental to conductivity due to Ag diffusion and oxidation. The tunable optical and electrical properties position ZnO/Ag bilayers as a suitable, low-cost alternative to commercial ITO films for emerging tailored flexible and transparent optoelectronic and photovoltaic devices.