High-temperature stable AlScN-based ferroelectric diodes with large on/off and rectification ratios
摘要
Ferroelectric diodes (FeDs) are regarded as a promising type of memory device for the post-Moore era due to their integration of non-volatile storage and rectification functionalities within a single device. This offers the potential for simplified structure, high-density integration, and in-memory computing. However, the critical challenge in realizing high-performance FeDs is to achieve a significant and stable on/off ratio, high rectification ratio, and robust device stability at elevated temperatures. Here, we demonstrate a metal-ferroelectric-metal (Ni-AlScN-TiN) FeDs utilizing aluminum scandium nitride (AlScN) that shows polarization-dependent hysteresis. The FeDs exhibit self-selective diode behavior with a rectification ratio exceeding 104 (at 11 V). The current-voltage (I-V) sweeps of the FeDs show an on/off ratio of greater than 4×104 for 8.8 V between low resistance states (LRS) and high resistance states (HRS). Furthermore, the devices demonstrate stable resistance states through 25 direct currents (DC) cycles and retain multi-level resistance states exceeding 1×104 s at room temperature (RT). Furthermore, the device retains clearly distinguishable switching states (on/off ratio > 104) at 180°C, with multi-level resistance states remaining stable for over 103 s at different temperatures. This work provides novel ideas and methodologies for multilevel storage in FeDs and significant potential for applications in extreme environments.