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<p>In micro-electromechanical systems, flexible pumps are critical for their integrability and compliance across diverse fields such as microfluidics and soft robotics. While most designs rely on periodic deformation of soft membranes, their performance is often limited by unpredictable displacement. This study introduced a novel full structural flexible pumping concept based on a reciprocating liquid metal piston (LMP), which was driven by a pressure difference generated through phase-change of a low-boiling-point fluid. The LMP eliminated the traditional rigid crank connecting rod mechanism and enabled compact, silent, and fully flexible operation. We conducted a series of tests on its kinematic performance, temperature response, and cycling repeatability in air and underwater environments. As a functional demonstration, the LMP was integrated into a robotic fish for active buoyancy regulation, successfully realizing reversible ascent and descent under low-voltage actuation. It is expected that this work could provide a new pathway toward precise and reliable micro-flow control in next-generation flexible machinery.</p>

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Liquid metal piston with flexible pumping and low friction features

  • 期刊论文

  • 发表日期：

    2026年4月16日

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  • Junwei Zhou,
  • Zhengke Wen,
  • Zhipeng Zhu,
  • Jing Liu,
  • Jiao Ye

摘要

In micro-electromechanical systems, flexible pumps are critical for their integrability and compliance across diverse fields such as microfluidics and soft robotics. While most designs rely on periodic deformation of soft membranes, their performance is often limited by unpredictable displacement. This study introduced a novel full structural flexible pumping concept based on a reciprocating liquid metal piston (LMP), which was driven by a pressure difference generated through phase-change of a low-boiling-point fluid. The LMP eliminated the traditional rigid crank connecting rod mechanism and enabled compact, silent, and fully flexible operation. We conducted a series of tests on its kinematic performance, temperature response, and cycling repeatability in air and underwater environments. As a functional demonstration, the LMP was integrated into a robotic fish for active buoyancy regulation, successfully realizing reversible ascent and descent under low-voltage actuation. It is expected that this work could provide a new pathway toward precise and reliable micro-flow control in next-generation flexible machinery.