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<p>The lifetime of piezoelectric inertial actuators (PIAs) is inherently limited by the friction-based driving mechanism, which remains a key challenge restricting commercialization. In our previous work, a long-lifetime PIA was proposed through a wear-adaptive structural configuration. This work was optimized by employing a dual-magnet repulsive configuration with parallel driving units, in which the <i>X</i> and <i>Y</i> degrees of freedom (DOF) share a single driving foot. This design makes the actuator thinner and prevents the piezoelectric stack from experiencing tensile and shear stresses. The actuator has an overall size of 84 mm × 84 mm × 17 mm, providing a stroke of 52 mm for each DOF, a driving speed of approximately 10 mm/s, a vertical load capacity exceeding 10 kg, and a horizontal load capacity greater than 1 N. The closed-loop positioning accuracy reaches 20 nm. At driving frequencies up to 500 Hz, the crosstalk between the two DOFs remains below 10%. Based on previous wear experiments and simulation predictions, the operating lifetime is estimated to approach 33572 km, far exceeding the 100 km lifetime of state-of-the-art piezoelectric inertial actuators. The proposed actuator is well-suited for applications requiring frequent reciprocating motion, such as microscope sample stages.</p>

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A compact two-degree-of-freedom piezoelectric inertial durable actuator with parallel driving units

  • 期刊论文

  • 发表日期：

    2026年6月18日

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  • Guangda Qiao,
  • Ziyue Zhang,
  • Runyi Deng,
  • Wenyan Zhang,
  • Hubiao Fang,
  • Dan Zhang,
  • Guofang Gong,
  • Huayong Yang,
  • Dong Han

摘要

The lifetime of piezoelectric inertial actuators (PIAs) is inherently limited by the friction-based driving mechanism, which remains a key challenge restricting commercialization. In our previous work, a long-lifetime PIA was proposed through a wear-adaptive structural configuration. This work was optimized by employing a dual-magnet repulsive configuration with parallel driving units, in which the X and Y degrees of freedom (DOF) share a single driving foot. This design makes the actuator thinner and prevents the piezoelectric stack from experiencing tensile and shear stresses. The actuator has an overall size of 84 mm × 84 mm × 17 mm, providing a stroke of 52 mm for each DOF, a driving speed of approximately 10 mm/s, a vertical load capacity exceeding 10 kg, and a horizontal load capacity greater than 1 N. The closed-loop positioning accuracy reaches 20 nm. At driving frequencies up to 500 Hz, the crosstalk between the two DOFs remains below 10%. Based on previous wear experiments and simulation predictions, the operating lifetime is estimated to approach 33572 km, far exceeding the 100 km lifetime of state-of-the-art piezoelectric inertial actuators. The proposed actuator is well-suited for applications requiring frequent reciprocating motion, such as microscope sample stages.