<p>AlGaInP-based red miniaturized light-emitting diode (mini-LED) is a key component in realizing a full-color display. One of the main obstacles originates from interfacial recombination at the AlGaInP-SiO<sub>2</sub> interface, and it is crucial to develop effective surface passivation strategies to achieve higher external quantum efficiency (EQE) in AlGaInP-based red mini-LEDs. Here, we demonstrated AlGaInP-based red flip-chip mini-LEDs with an AlN passivation layer via atomic layer deposition (ALD). Utilizing a Monte Carlo ray tracing method, we investigated the effects of the SiO<sub>2</sub> passivation layer and the AlN passivation layer on the optical performances of mini-LEDs. Since the refractive index of AlN is between AlGaInP and SiO<sub>2</sub>, the total internal reflection is alleviated and light extraction is enhanced. Unexpectedly, the AlN passivation layer also contributes to improving the current spreading ability of mini-LEDs, which is demonstrated by the near-field light distribution. Benefiting from superior light extraction and improved current spreading, the EQE of the mini-LED with an AlN passivation layer realizes an increment of 16.1% at 5 mA, in comparison to the mini-LED with a SiO<sub>2</sub> passivation layer. The EQE of mini-LEDs with an AlN passivation layer reaches a competitive value of 22.3% at 5 mA, surpassing previously reported AlGaInP-based red mini-LEDs. Moreover, the high temperature-humidity aging test exhibits that the AlN passivation layer effectively enhances the reliability of mini-LEDs. This work provides guidance for high-performance AlGaInP-based red flip-chip miniLEDs design and manufacture.</p>

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High-performance AlGaInP-based red flip-chip mini-LEDs with AlN passivation layer

  • Lang Shi,
  • Linyue Meng,
  • Siyuan Cui,
  • Jingjing Jiang,
  • Jiahui Hu,
  • Guosheng Wen,
  • Sheng Liu,
  • Shengjun Zhou

摘要

AlGaInP-based red miniaturized light-emitting diode (mini-LED) is a key component in realizing a full-color display. One of the main obstacles originates from interfacial recombination at the AlGaInP-SiO2 interface, and it is crucial to develop effective surface passivation strategies to achieve higher external quantum efficiency (EQE) in AlGaInP-based red mini-LEDs. Here, we demonstrated AlGaInP-based red flip-chip mini-LEDs with an AlN passivation layer via atomic layer deposition (ALD). Utilizing a Monte Carlo ray tracing method, we investigated the effects of the SiO2 passivation layer and the AlN passivation layer on the optical performances of mini-LEDs. Since the refractive index of AlN is between AlGaInP and SiO2, the total internal reflection is alleviated and light extraction is enhanced. Unexpectedly, the AlN passivation layer also contributes to improving the current spreading ability of mini-LEDs, which is demonstrated by the near-field light distribution. Benefiting from superior light extraction and improved current spreading, the EQE of the mini-LED with an AlN passivation layer realizes an increment of 16.1% at 5 mA, in comparison to the mini-LED with a SiO2 passivation layer. The EQE of mini-LEDs with an AlN passivation layer reaches a competitive value of 22.3% at 5 mA, surpassing previously reported AlGaInP-based red mini-LEDs. Moreover, the high temperature-humidity aging test exhibits that the AlN passivation layer effectively enhances the reliability of mini-LEDs. This work provides guidance for high-performance AlGaInP-based red flip-chip miniLEDs design and manufacture.