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<p>The microlens array (MLA) has been extensively utilized in optical systems; however, fabricating high-precision MLA molds for glass molding remains a significant challenge due to the inherent hardness and brittleness of conventional mold materials. In the present investigation, an Ir-Ni-Ta-Nb high-temperature metallic glass (ht-MG) is methodically examined as a promising alternative mold material for precision glass molding. The high-temperature properties of ht-MG—including compressive strength, hardness, oxidation resistance, thermal expansion, and adhesion resistance—are systematically evaluated, confirming its suitability for mold applications. Furthermore, utilizing the thermoplastic formability of ht-MG, MLA molds with a unit diameter of 80 μm and a sagittal height of 25 μm are successfully fabricated. Surface roughness measurements further confirmed the fidelity of the pattern transfer, with the ht-MG mold exhibiting only a slight increase in roughness from 4.583 to 4.735 nm, whereas the final glass MLA maintains a surface roughness of 5.689 nm. The glass MLA fabricated via the ht-MG mold exhibits an exceptional replication rate of 99.5%, ensuring fairly accurate structural reproduction. Furthermore, optical characterization confirms that the molded glass MLA possesses high-quality imaging and focusing capabilities, with well-defined focal spots and minimal aberrations. The uniformity of the microlenses and their optical performance firmly confirm the effectiveness of the ht-MG mold in achieving precise optical structures. This study effectively presents a reliable material and non-mechanical-machining strategy for fabricating high-precision MLA molds via amorphous alloy materials and provides an effective scalable approach for manufacturing high-performance optical glass components.</p>

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Precision glass molding with high-temperature metallic glass as inserts

  • 期刊论文

  • 发表日期：

    2025年8月8日

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  • Fei Sun,
  • Yuan Huang,
  • Sirui Cheng,
  • Shike Huang,
  • Xichuan Wang,
  • Jiahua Zhu,
  • Wenfei Lu,
  • Ying Ding,
  • Tingting Wu,
  • Jiang Ma,
  • Yanhui Liu,
  • Jun Shen

摘要

The microlens array (MLA) has been extensively utilized in optical systems; however, fabricating high-precision MLA molds for glass molding remains a significant challenge due to the inherent hardness and brittleness of conventional mold materials. In the present investigation, an Ir-Ni-Ta-Nb high-temperature metallic glass (ht-MG) is methodically examined as a promising alternative mold material for precision glass molding. The high-temperature properties of ht-MG—including compressive strength, hardness, oxidation resistance, thermal expansion, and adhesion resistance—are systematically evaluated, confirming its suitability for mold applications. Furthermore, utilizing the thermoplastic formability of ht-MG, MLA molds with a unit diameter of 80 μm and a sagittal height of 25 μm are successfully fabricated. Surface roughness measurements further confirmed the fidelity of the pattern transfer, with the ht-MG mold exhibiting only a slight increase in roughness from 4.583 to 4.735 nm, whereas the final glass MLA maintains a surface roughness of 5.689 nm. The glass MLA fabricated via the ht-MG mold exhibits an exceptional replication rate of 99.5%, ensuring fairly accurate structural reproduction. Furthermore, optical characterization confirms that the molded glass MLA possesses high-quality imaging and focusing capabilities, with well-defined focal spots and minimal aberrations. The uniformity of the microlenses and their optical performance firmly confirm the effectiveness of the ht-MG mold in achieving precise optical structures. This study effectively presents a reliable material and non-mechanical-machining strategy for fabricating high-precision MLA molds via amorphous alloy materials and provides an effective scalable approach for manufacturing high-performance optical glass components.