Scholarlink

<p>Robot-assisted minimally invasive surgery (RMIS) has attracted notable attention because of its numerous advantages over traditional surgery. Nevertheless, the lack of real-time force feedback in RMIS can result in surgical errors and damage to delicate tissues. The stringent requirements for the sensitivity and volume of force sensors in RMIS make the design and fabrication of such sensors a considerable challenge. Herein, we present a high-sensitivity three-dimensional (3D) force sensing module consisting of a micro-electro-mechanical piezoresistive sensor chip and a polydimethylsiloxane cap with pyramidal microstructures for force transmission. The sensor chip incorporates four cantilevers with a circular microhole at their fixed ends to concentrate stress in piezoresistive areas; the shape of the microhole was optimized to ensure an appropriate trade-off between high sensitivity and reliability. The proposed 3D force sensor showed more than twice higher sensitivity in the <i>X</i>-, <i>Y</i>-, and <i>Z</i>-axis directions than the sensor based on traditional cantilevers. Furthermore, the proposed sensor exhibited little hysteresis (&lt;1.91%), good stability, and fast response (∼30 ms). An artificial neural network was adopted for 3D force decoupling; this network accurately converted resistance changes into 3D forces, showing a prediction error of &lt;2%. Furthermore, the proposed sensor was integrated into a robot to perform various clamping tasks, exhibiting good application potential for RMIS.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Highly sensitive MEMS three-dimensional force sensor for robot-assisted minimally invasive surgery

  • 期刊论文

  • 发表日期：

    2025年8月14日

查看全文
  • Dongsheng Li,
  • Aomen Li,
  • Zhongbin Zhang,
  • Tianci Ji,
  • Kaiyao Wang,
  • Huicong Liu

摘要

Robot-assisted minimally invasive surgery (RMIS) has attracted notable attention because of its numerous advantages over traditional surgery. Nevertheless, the lack of real-time force feedback in RMIS can result in surgical errors and damage to delicate tissues. The stringent requirements for the sensitivity and volume of force sensors in RMIS make the design and fabrication of such sensors a considerable challenge. Herein, we present a high-sensitivity three-dimensional (3D) force sensing module consisting of a micro-electro-mechanical piezoresistive sensor chip and a polydimethylsiloxane cap with pyramidal microstructures for force transmission. The sensor chip incorporates four cantilevers with a circular microhole at their fixed ends to concentrate stress in piezoresistive areas; the shape of the microhole was optimized to ensure an appropriate trade-off between high sensitivity and reliability. The proposed 3D force sensor showed more than twice higher sensitivity in the X-, Y-, and Z-axis directions than the sensor based on traditional cantilevers. Furthermore, the proposed sensor exhibited little hysteresis (<1.91%), good stability, and fast response (∼30 ms). An artificial neural network was adopted for 3D force decoupling; this network accurately converted resistance changes into 3D forces, showing a prediction error of <2%. Furthermore, the proposed sensor was integrated into a robot to perform various clamping tasks, exhibiting good application potential for RMIS.