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<p>Robotic systems with nanoscale motion resolution enable precise manipulation and characterization of nanomaterials, supporting the assembly and fabrication of functional nanodevices. Compared to Atomic Force Microscope (AFM)-based manipulation systems, Scanning Electron Microscope (SEM)-based nanorobotic platforms facilitate multiple in-situ tasks while providing real-time visual feedback. Integrating haptic feedback with visual input further enhances human-in-the-loop control, offering intuitive guidance during micro- and nanoscale experimentation. This paper presents an enhanced bilateral teleoperation framework for an SEM-based nanorobotic system, addressing key challenges in stability, transparency, haptic integration, and adaptive control. A scaled force–position controller with direct force reflection is developed to ensure accurate bidirectional communication between the master and follower manipulators. To address the limitations of fixed scaling, a novel real-time adaptive scaling methodology is introduced, which dynamically adjusts control resolution according to SEM magnification. This approach maintains consistent motion fidelity and enables seamless transitions across varying operational scales, facilitating precise, multiscale SEM-based applications tasks. The system integrates a self-sensing piezoresistive microcantilever for nanoscale force measurement and a unified haptic–visual interface developed using the open-source Haptics 3D (H3D) Application Programming Interface (API). Experimental validation confirms stable operation with sub-micrometer trajectory-tracking accuracy, perceivable force-reflection sensitivity of 20&#xa0;nN, and robustness to communication delays, establishing a reliable platform for in situ nanofabrication, nanoassembly, and material characterization tasks.</p>

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Design and development of an enhanced bilateral nanorobotic manipulation system with an X3D-based haptic interface for multiscale applications inside an SEM

  • 期刊论文

  • 发表日期：

    2026年1月17日

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  • Ujjal Dey,
  • Kumar Cheruvu Siva

摘要

Robotic systems with nanoscale motion resolution enable precise manipulation and characterization of nanomaterials, supporting the assembly and fabrication of functional nanodevices. Compared to Atomic Force Microscope (AFM)-based manipulation systems, Scanning Electron Microscope (SEM)-based nanorobotic platforms facilitate multiple in-situ tasks while providing real-time visual feedback. Integrating haptic feedback with visual input further enhances human-in-the-loop control, offering intuitive guidance during micro- and nanoscale experimentation. This paper presents an enhanced bilateral teleoperation framework for an SEM-based nanorobotic system, addressing key challenges in stability, transparency, haptic integration, and adaptive control. A scaled force–position controller with direct force reflection is developed to ensure accurate bidirectional communication between the master and follower manipulators. To address the limitations of fixed scaling, a novel real-time adaptive scaling methodology is introduced, which dynamically adjusts control resolution according to SEM magnification. This approach maintains consistent motion fidelity and enables seamless transitions across varying operational scales, facilitating precise, multiscale SEM-based applications tasks. The system integrates a self-sensing piezoresistive microcantilever for nanoscale force measurement and a unified haptic–visual interface developed using the open-source Haptics 3D (H3D) Application Programming Interface (API). Experimental validation confirms stable operation with sub-micrometer trajectory-tracking accuracy, perceivable force-reflection sensitivity of 20 nN, and robustness to communication delays, establishing a reliable platform for in situ nanofabrication, nanoassembly, and material characterization tasks.