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<p>This work presents a low-cost optical sensing system based on a guided mode resonance (GMR) sensor for real-time monitoring of mechanical vibrations and structural deformations. The sensor operates by detecting resonance wavelength shift induced by asymmetric optical excitation, which occurs through physical bending of the device. Fabricated on a flexible polyethylene terephthalate (PET) substrate, the sensor integrates a subwavelength grating via hot embossing method and a tantalum oxide (Ta<sub>2</sub>O<sub>5</sub>) waveguide layer deposited by sputtering technique. This configuration allows for high bendability with minimal distortion of the nanoscale structure. Experimental characterization under static edge pressing demonstrates clear resonance dip splitting and displacement-dependent wavelength shifts that align with theoretical predictions following resonance phase matching mechanism. For dynamic testing, a simplified intensity interrogation system using a 635&#xa0;nm laser diode and a photoresistor detects vibrations simulated by a speaker membrane. The system achieves a dynamic sensitivity of 7.4&#xa0;μm/V across the frequency range between 5 and 50&#xa0;Hz with average signal noise of 3.87&#xa0;μm. Frequency components extracted by Fourier analysis match input signals. The proposed GMR sensor offers a scalable, eco-friendly, and cost-effective solution for structural health monitoring and smart infrastructure applications.</p>

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Flexible Guided Mode Resonance for Low Frequency Vibration Sensing Towards Structure Failure Monitoring Application

  • 期刊论文

  • 发表日期：

    2026年4月28日

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  • Nurul Athirah Mohamad Abdul Ghafar,
  • Sakoolkan Boonruang,
  • Arni Munira Markom,
  • Nur Farhanah Zulkipli,
  • Sulaiman Wadi Harun,
  • Waleed S. Mohammed

摘要

This work presents a low-cost optical sensing system based on a guided mode resonance (GMR) sensor for real-time monitoring of mechanical vibrations and structural deformations. The sensor operates by detecting resonance wavelength shift induced by asymmetric optical excitation, which occurs through physical bending of the device. Fabricated on a flexible polyethylene terephthalate (PET) substrate, the sensor integrates a subwavelength grating via hot embossing method and a tantalum oxide (Ta2O5) waveguide layer deposited by sputtering technique. This configuration allows for high bendability with minimal distortion of the nanoscale structure. Experimental characterization under static edge pressing demonstrates clear resonance dip splitting and displacement-dependent wavelength shifts that align with theoretical predictions following resonance phase matching mechanism. For dynamic testing, a simplified intensity interrogation system using a 635 nm laser diode and a photoresistor detects vibrations simulated by a speaker membrane. The system achieves a dynamic sensitivity of 7.4 μm/V across the frequency range between 5 and 50 Hz with average signal noise of 3.87 μm. Frequency components extracted by Fourier analysis match input signals. The proposed GMR sensor offers a scalable, eco-friendly, and cost-effective solution for structural health monitoring and smart infrastructure applications.