This work represents a 2D TCAD-based exploration of dielectrically modulated dual material gate stack source cavity hetero MOSFET (DM-GS-SCH-MOSFET) biosensor for the identification of various label-free biomolecules like uricase, streptavidin, ferro cytochrome, and protein. The investigation of sensitivity performances have been done by varying the structural constraints such as cavity length ( \(\:{L}_{cavity}\) ) and oxide thickness ( \(\:{t}_{ox}\) ). The variation of \(\:{L}_{cavity}\) from 15 nm to 21 nm with the step of 3 nm and \(\:{t}_{ox}\) variation from 1 nm to 3 nm with the step of 1 nm are considered. of The neutral biomolecules impact has been observed on various electrical parameters like On current, switching ratio, On current sensitivity, threshold voltage sensitivity, and subthreshold performance of DM-GS-SCH-MOSFET biosensor using 2D TCAD simulator. The performance of electrostatic parameters such as surface potential and current in the presence of different charged biomolecules are analyzed. From the analysis, it is found that the protein biomolecule demonstrates better performance as compared to other biomolecules. The protein biomolecule offers a voltage, subthreshold swing and On current sensitivity of 0.56, 0.96, and 1.79 achieved for a cavity length ( \(\:{L}_{cavity}\) =15 nm) and oxide thickness ( \(\:{t}_{ox}\) =1 nm) respectively.
