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<p>Three TiO<sub>2</sub> thin films, TiO<sub>2</sub>-DIP, TiO<sub>2</sub>-SPIN, and TiO<sub>2</sub>-AMORF, are deposited on glass substrates using the sol-gel method for a&#xa0;comparative study. The TiO<sub>2</sub>-DIP film is fabricated using dip-coating and annealed at 500 °C, the TiO<sub>2</sub>-SPIN film is prepared via spin-coating and annealed at 500 °C, while the TiO<sub>2</sub>-AMORF film is produced by dip-coating but annealed at 300 °C. An XRD analysis reveals that both TiO<sub>2</sub>-DIP and TiO<sub>2</sub>-SPIN films exhibit the anatase phase, In contrast, the TiO<sub>2</sub>-AMORF film remains amorphous, while Raman spectroscopy indicates that both TiO<sub>2</sub>-DIP and TiO<sub>2</sub>-SPIN are predominantly in the anatase phase, with a&#xa0;small percentage of brookite, while TiO<sub>2</sub>-AMORF is confirmed to be amorphous. The SEM images show that the TiO<sub>2</sub>-SPIN film has a&#xa0;highly homogeneous surface with randomly distributed grains. The AFM measurements indicate that the TiO<sub>2</sub>-DIP film exhibits a&#xa0;smoother surface, TiO<sub>2</sub>-SPIN film has a&#xa0;rougher surface, while the TiO<sub>2</sub>-AMORF film demonstrates an ultra-smooth surface. The optical transmittance of the films ranges from 52&#xa0;to 93% in the visible spectrum. The optical bandgaps are 3.418 eV for TiO<sub>2</sub>-DIP, 3.684 eV for TiO<sub>2</sub>-SPIN and 3.611 eV for TiO<sub>2</sub>-AMORF. The m‑line spectroscopy reveals single guided modes both in transverse electric (TE) and transverse magnetic (TM) polarizations for all samples. Notably, the TiO<sub>2</sub>-AMORF film exhibits a&#xa0;dip in the reflected intensity mode, attributed to its highly smooth surface (RMS = 937 pm). Among the samples, the amorphous TiO<sub>2</sub>-AMORF film demonstrates the most favorable waveguiding properties.</p>

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Comparative study of amorphous and crystalline TiO2 thin films elaborated by sol-gel method for optical waveguiding applications

  • 期刊论文

  • 发表日期：

    2026年1月15日

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  • O. Meziti,
  • R. Aouati,
  • A. Bouabellou,
  • Y. Bouachiba,
  • H. Djaaboube,
  • A. Taabouche

摘要

Three TiO2 thin films, TiO2-DIP, TiO2-SPIN, and TiO2-AMORF, are deposited on glass substrates using the sol-gel method for a comparative study. The TiO2-DIP film is fabricated using dip-coating and annealed at 500 °C, the TiO2-SPIN film is prepared via spin-coating and annealed at 500 °C, while the TiO2-AMORF film is produced by dip-coating but annealed at 300 °C. An XRD analysis reveals that both TiO2-DIP and TiO2-SPIN films exhibit the anatase phase, In contrast, the TiO2-AMORF film remains amorphous, while Raman spectroscopy indicates that both TiO2-DIP and TiO2-SPIN are predominantly in the anatase phase, with a small percentage of brookite, while TiO2-AMORF is confirmed to be amorphous. The SEM images show that the TiO2-SPIN film has a highly homogeneous surface with randomly distributed grains. The AFM measurements indicate that the TiO2-DIP film exhibits a smoother surface, TiO2-SPIN film has a rougher surface, while the TiO2-AMORF film demonstrates an ultra-smooth surface. The optical transmittance of the films ranges from 52 to 93% in the visible spectrum. The optical bandgaps are 3.418 eV for TiO2-DIP, 3.684 eV for TiO2-SPIN and 3.611 eV for TiO2-AMORF. The m‑line spectroscopy reveals single guided modes both in transverse electric (TE) and transverse magnetic (TM) polarizations for all samples. Notably, the TiO2-AMORF film exhibits a dip in the reflected intensity mode, attributed to its highly smooth surface (RMS = 937 pm). Among the samples, the amorphous TiO2-AMORF film demonstrates the most favorable waveguiding properties.