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<p>Micro-opto-electro-mechanical system (MOEMS) biosensors show significant potential applications in diverse fields such as disease monitoring, pharmaceutical research, pollutant detection, and biological fluid analysis. In this work, we present a novel biosensor based on a diaphragm structure and an optical readout circuit (ROC) that operates through hybrid plasmonic mechanisms. The sensor is designed for the detection of prostate-specific antigen (PSA) molecules. The binding of target molecules induces a mechanical bending on the diaphragm which modulates the air gap distance of ROC. This deformation leads to a shift in the transmitted optical wavelength, subsequently the output wavelength changes in proportion to the concentration of the target molecules. The proposed sensor features a compact footprint of 350 × 40 × 1 µm<sup>3</sup> and demonstrates a mechanical sensitivity of 0.105&#xa0;nm per ng/mL of PSA. Moreover, it achieves a wavelength shift of 193&#xa0;nm over a broad PSA concentration range of 0 to 1000 ng/mL, corresponding to an optical sensitivity of 0.193&#xa0;nm per ng/mL. The proposed system offers high sensitivity for detecting various biomolecules, making it suitable for advanced biosensing applications.</p> Graphical abstract <p></p> <p>In this sensor, target molecules land on receptors placed on a flexible diaphragm. Their binding causes the diaphragm to bend, which changes the air gap in the optical readout system. As the air gap changes, the wavelength of the reflected light shifts. By tracking this wavelength shift, we can estimate how many target molecules are present.</p>

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Hybrid plasmonic MOEMS biosensor for PSA detection

  • 期刊论文

  • 发表日期：

    2026年4月17日

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  • Hossein Bahramian ,
  • Jalal Gholinejad ,
  • Arash Yazdanpanah Goharrizi

摘要

Micro-opto-electro-mechanical system (MOEMS) biosensors show significant potential applications in diverse fields such as disease monitoring, pharmaceutical research, pollutant detection, and biological fluid analysis. In this work, we present a novel biosensor based on a diaphragm structure and an optical readout circuit (ROC) that operates through hybrid plasmonic mechanisms. The sensor is designed for the detection of prostate-specific antigen (PSA) molecules. The binding of target molecules induces a mechanical bending on the diaphragm which modulates the air gap distance of ROC. This deformation leads to a shift in the transmitted optical wavelength, subsequently the output wavelength changes in proportion to the concentration of the target molecules. The proposed sensor features a compact footprint of 350 × 40 × 1 µm3 and demonstrates a mechanical sensitivity of 0.105 nm per ng/mL of PSA. Moreover, it achieves a wavelength shift of 193 nm over a broad PSA concentration range of 0 to 1000 ng/mL, corresponding to an optical sensitivity of 0.193 nm per ng/mL. The proposed system offers high sensitivity for detecting various biomolecules, making it suitable for advanced biosensing applications.

Graphical abstract

In this sensor, target molecules land on receptors placed on a flexible diaphragm. Their binding causes the diaphragm to bend, which changes the air gap in the optical readout system. As the air gap changes, the wavelength of the reflected light shifts. By tracking this wavelength shift, we can estimate how many target molecules are present.