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<p>In this work, a novel single-axis micro-opto-electro-mechanical-system (MOEMS) accelerometer based on a differential plasmonic metal–insulator–metal (MIM) waveguide is designed and numerically evaluated. The proposed device employs an mechanical–optical co-design approach, in which the mechanical suspension and plasmonic sensing structure are engineered concurrently to enhance optomechanical coupling and sensing performance. The mechanical subsystem consists of a suspended proof mass supported by four engineered L-shaped flexures, enabling stable and linear displacement along the sensitive axis under applied acceleration. The sensing principle is based on resonant wavelength modulation of the plasmonic MIM waveguide induced by acceleration-driven displacement of the proof mass, resulting in a measurable shift in the transmission spectrum. A coordinated numerical framework is employed to evaluate the device performance: mechanical behavior and modal characteristics are analyzed using COMSOL Multiphysics, whereas the plasmonic optical response is investigated using Lumerical FDTD Solutions. Spectral and modal analyses confirm that the sensing mechanism is governed by a strongly confined fundamental plasmonic mode with a resonance wavelength near 887&#xa0;nm in the near-infrared region. The fundamental mechanical resonance frequency is approximately 3.45&#xa0;kHz, ensuring stable operation within the intended frequency bandwidth. Simulation results demonstrate a mechanical sensitivity of 20.07&#xa0;nm/g, an optical sensitivity of 0.4204, and an overall sensitivity of 8.43&#xa0;nm/g over a linear range of ± 5&#xa0;g. Comparative analysis shows a favorable sensitivity–range trade-off with a competitive figure of merit (FOM) of 81.7.</p>

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Single-axis plasmonic accelerometer based on wavelength modulation in a metal–insulator–metal (MIM) waveguide

  • 期刊论文

  • 发表日期：

    2026年2月27日

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  • Hengameh Farrokhi,
  • Sedighe Babaei Sedaghat

摘要

In this work, a novel single-axis micro-opto-electro-mechanical-system (MOEMS) accelerometer based on a differential plasmonic metal–insulator–metal (MIM) waveguide is designed and numerically evaluated. The proposed device employs an mechanical–optical co-design approach, in which the mechanical suspension and plasmonic sensing structure are engineered concurrently to enhance optomechanical coupling and sensing performance. The mechanical subsystem consists of a suspended proof mass supported by four engineered L-shaped flexures, enabling stable and linear displacement along the sensitive axis under applied acceleration. The sensing principle is based on resonant wavelength modulation of the plasmonic MIM waveguide induced by acceleration-driven displacement of the proof mass, resulting in a measurable shift in the transmission spectrum. A coordinated numerical framework is employed to evaluate the device performance: mechanical behavior and modal characteristics are analyzed using COMSOL Multiphysics, whereas the plasmonic optical response is investigated using Lumerical FDTD Solutions. Spectral and modal analyses confirm that the sensing mechanism is governed by a strongly confined fundamental plasmonic mode with a resonance wavelength near 887 nm in the near-infrared region. The fundamental mechanical resonance frequency is approximately 3.45 kHz, ensuring stable operation within the intended frequency bandwidth. Simulation results demonstrate a mechanical sensitivity of 20.07 nm/g, an optical sensitivity of 0.4204, and an overall sensitivity of 8.43 nm/g over a linear range of ± 5 g. Comparative analysis shows a favorable sensitivity–range trade-off with a competitive figure of merit (FOM) of 81.7.