<p>This study presents a micro-electro-mechanical system (MEMS) gyroscope featuring an innovative perturbation structure in the perturbation stiffness induced by angular velocity is applied to a serpentine coupling beam. Considering the symmetry of the initial structure of resonators and the asymmetry in stiffness resulting from initial manufacturing defects, the dynamic characteristics in the linear regime are analyzed using the complex exponential method. By integrating the backbone curve, energy balance method, amplitude-frequency response (AFR), and bifurcation analysis, we reveal the gyroscope's dynamics, mode localization phenomenon, and sensitivity performance in the geometrically nonlinear case. Subsequently, the excitation threshold at which bifurcation occurs in the out-of-phase nonlinear normal mode (NNM) is determined. Taking the excitation voltage exceeds the bifurcation threshold, the results indicate that the mode localization due to nonlinear characteristics increases the sensitivity from 0.22 ppm/°/s to 789.4 ppm/°/s when initial manufacturing defects are not considered. Furthermore, owing to the implementation of out-of-phase dual-resonator-driven, only the out-of-phase NNM is excited and forms a mode localization phenomenon, so avoiding the phenomenon of modal overlap. Accounting for the stiffness error (± 3%) caused by initial manufacturing defects, the amplitude ratio difference sensitivity improves by 314% in the nonlinear case compared to the linear case and by 103.3% relative to the nonlinear symmetric regime. The gyroscope sensitivity escalates with the rising absolute value of the stiffness error. The novel perturbation structure design for mode localization MEMS gyroscope exploits initial stiffness errors and nonlinearity to achieve a higher sensitivity output than the initial symmetric structure.</p>

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Exploiting a novel perturbation structure to overcome manufacturing defect and modal overlap in mode localization MEMS gyroscope

  • Kunpeng Zhang,
  • Wei Li,
  • Shuying Hao

摘要

This study presents a micro-electro-mechanical system (MEMS) gyroscope featuring an innovative perturbation structure in the perturbation stiffness induced by angular velocity is applied to a serpentine coupling beam. Considering the symmetry of the initial structure of resonators and the asymmetry in stiffness resulting from initial manufacturing defects, the dynamic characteristics in the linear regime are analyzed using the complex exponential method. By integrating the backbone curve, energy balance method, amplitude-frequency response (AFR), and bifurcation analysis, we reveal the gyroscope's dynamics, mode localization phenomenon, and sensitivity performance in the geometrically nonlinear case. Subsequently, the excitation threshold at which bifurcation occurs in the out-of-phase nonlinear normal mode (NNM) is determined. Taking the excitation voltage exceeds the bifurcation threshold, the results indicate that the mode localization due to nonlinear characteristics increases the sensitivity from 0.22 ppm/°/s to 789.4 ppm/°/s when initial manufacturing defects are not considered. Furthermore, owing to the implementation of out-of-phase dual-resonator-driven, only the out-of-phase NNM is excited and forms a mode localization phenomenon, so avoiding the phenomenon of modal overlap. Accounting for the stiffness error (± 3%) caused by initial manufacturing defects, the amplitude ratio difference sensitivity improves by 314% in the nonlinear case compared to the linear case and by 103.3% relative to the nonlinear symmetric regime. The gyroscope sensitivity escalates with the rising absolute value of the stiffness error. The novel perturbation structure design for mode localization MEMS gyroscope exploits initial stiffness errors and nonlinearity to achieve a higher sensitivity output than the initial symmetric structure.