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<p>Electrothermal microactuator (ETA) is a promising option for high-precision micromanipulation in MEMS. In this paper, the Local Radial Point Interpolation Method (LRPIM), a meshless technique, is applied for the theoretical analysis of the V-shaped ETA. A transient electrothermal model, which accounts for material nonlinearity, is presented. A combination of the LRPIM and forward difference method is adopted to evaluate the temperature distribution, in which the stability of the calculations is analyzed to ensure convergence. Based on the thermal strain and boundary condition, the elastic equilibrium equation for displacement analysis is derived. Furthermore, infrared thermal imaging technology is employed to capture the ETA’s temperature image. Additionally, FEM analysis is conducted to evaluate the elastic deflection of the actuator. The comparisons on the temperature and displacement from different ways are made, respectively. It is eventually demonstrated that the present meshless method LRPIM is accurate to predict the dynamic behavior of the V-shaped ETA.</p>

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Dynamic response of a MEMS electrothremal actuator by the local radial point interpolation method

  • 期刊论文

  • 发表日期：

    2025年1月2日

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  • Hao Chen,
  • Xiangdong Sun,
  • Mengxu Chen,
  • Xiaoyu Kong

摘要

Electrothermal microactuator (ETA) is a promising option for high-precision micromanipulation in MEMS. In this paper, the Local Radial Point Interpolation Method (LRPIM), a meshless technique, is applied for the theoretical analysis of the V-shaped ETA. A transient electrothermal model, which accounts for material nonlinearity, is presented. A combination of the LRPIM and forward difference method is adopted to evaluate the temperature distribution, in which the stability of the calculations is analyzed to ensure convergence. Based on the thermal strain and boundary condition, the elastic equilibrium equation for displacement analysis is derived. Furthermore, infrared thermal imaging technology is employed to capture the ETA’s temperature image. Additionally, FEM analysis is conducted to evaluate the elastic deflection of the actuator. The comparisons on the temperature and displacement from different ways are made, respectively. It is eventually demonstrated that the present meshless method LRPIM is accurate to predict the dynamic behavior of the V-shaped ETA.