Transition to chaos in an electrostatically excited curved micro-resonator due to an added mass
摘要
This work establishes a novel design framework for Micro-Electromechanical Systems (MEMS) that addresses persistent operational challenges, including dielectric charging and mechanical fatigue, while enabling precise control over both static and dynamic regimes. The principal innovation involves the implementation of a tri-electrode actuation architecture. This configuration provides independent control over the actuation level and facilitates the deterministic reconfiguration of the resonator vibrational mode, allowing for a dynamic transition between symmetric and anti-symmetric beam profiles through voltage bias adjustment. This foundational technique is subsequently leveraged to engineer a high-sensitivity mass-detection micro-sensor. The sensing mechanism is based on monitoring perturbations in the system dynamic response induced by mass adsorption. Specifically, the added mass manifests as a measurable shift in the orbital trajectory or the emergence of new spectral components in the Fast Fourier Transform (FFT). The results demonstrate that a minimal mass load can precipitate a significant alteration in the system dynamics, including a pronounced frequency shift and, in specific operational regimes, a transition to chaotic motion. This bifurcation serves as a distinct indicator of a motion stability transition, providing a highly sensitive metric for mass detection.