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<p>Metal–Organic Chemical Vapor Deposition (MOCVD) is a vigorously growing technique for film production. Accurate vapor pressure, as well as sublimation and fusion thermodynamics of the precursor used in MOCVD is paramount for achieving the desired film composition, growth rates, uniformity, and functionality. Herein, we present the results of thermodynamic study of magnesium heteroligand complexes with aromatic neutral ligands Q = bipy (2,2′-bipyridine) or phen (1,10-phenanthroline), and hfac (1,1,1,5,5,5-hexafluoropentane-2,4-dionate anion). The complexes have been synthesized, purified, and identified. Differential scanning calorimetry has been applied to measure the melting temperature and fusion enthalpy. Saturated vapor pressures over the solid compounds were measured by a transpiration method. Thermodynamic characteristics of enthalpy and entropy of the sublimation process have been calculated from the experimental data at average temperature and at 298.15&#xa0;K; the <i>p</i>(<i>T</i>) equations operating over a wide temperature range have been derived. [Mg(bipy)(hfac)<sub>2</sub>] was tested as an MOCVD precursor. Thermodynamic simulation has been executed to outline the conditions for film deposition formation in various reactive atmospheres. The critical importance of precise thermodynamic data on sublimation has been highlighted through a set of MOCVD experiments on the production of MgF<sub>2</sub> films.</p> Graphical Abstract <p></p>

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Phase thermodynamics starring in film production: magnesium complexes with aromatic and beta-diketonate ligands

  • 期刊论文

  • 发表日期：

    2026年2月7日

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  • Kseniya V. Zherikova,
  • Alexander M. Makarenko,
  • Georgii S. Evseev,
  • Erik A. Rikhter,
  • Denis P. Pishchur,
  • Ilia V. Korolkov,
  • Sergey V. Sysoev,
  • Evgeniia S. Vikulova

摘要

Metal–Organic Chemical Vapor Deposition (MOCVD) is a vigorously growing technique for film production. Accurate vapor pressure, as well as sublimation and fusion thermodynamics of the precursor used in MOCVD is paramount for achieving the desired film composition, growth rates, uniformity, and functionality. Herein, we present the results of thermodynamic study of magnesium heteroligand complexes with aromatic neutral ligands Q = bipy (2,2′-bipyridine) or phen (1,10-phenanthroline), and hfac (1,1,1,5,5,5-hexafluoropentane-2,4-dionate anion). The complexes have been synthesized, purified, and identified. Differential scanning calorimetry has been applied to measure the melting temperature and fusion enthalpy. Saturated vapor pressures over the solid compounds were measured by a transpiration method. Thermodynamic characteristics of enthalpy and entropy of the sublimation process have been calculated from the experimental data at average temperature and at 298.15 K; the p(T) equations operating over a wide temperature range have been derived. [Mg(bipy)(hfac)2] was tested as an MOCVD precursor. Thermodynamic simulation has been executed to outline the conditions for film deposition formation in various reactive atmospheres. The critical importance of precise thermodynamic data on sublimation has been highlighted through a set of MOCVD experiments on the production of MgF2 films.

Graphical Abstract