<p>Siloxane-based materials have a wide range of applications due to their high thermal and chemical stability, as well as tunable properties and functions achieved by incorporating organic groups via Si–C bonds. Imparting self-healing abilities to siloxane-based materials represents an effective strategy for enhancing their lifetime and reliability. Both extrinsic and intrinsic self-healing systems in siloxane-based materials have been extensively studied. This review focuses on recent progress in the intrinsic self-healing of siloxane-based materials, particularly highlighting research on healing mechanisms through the use of siloxane bonds as dynamic bonds. Additionally, new self-healing systems based on mesoscale structural control of silica and silsesquioxane are introduced.</p> Graphical Abstract <p></p>