<p>AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.</p>

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Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films

  • Yifei Zhang,
  • Zhengwei Li,
  • Mengxian Zhang,
  • Guofu Liao,
  • Zhouhui Liu,
  • Yu Xu,
  • Nan Li,
  • Liangpeng Xie,
  • Junjie Zhou,
  • Xufang Li,
  • He Gao,
  • Shibo Shu,
  • Yongping Li,
  • Yudong Gu,
  • Daikang Yan,
  • Xuefeng Lu,
  • Hua Feng,
  • Yongjie Zhang,
  • Congzhan Liu

摘要

AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.