<p>The optical transition-edge sensor (TES) pushes the boundary on fault-tolerant photonic quantum computers and low-invasive bio-imaging systems. As these systems evolve, there is an increasing demand for using a TES array comprising many sensors, often exceeding one hundred. Critical temperature <InlineEquation ID="IEq1"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10909_2025_3324_Article_IEq1.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="18" /> </InlineMediaObject> <EquationSource Format="TEX">\(T_c\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>T</mi> <mi>c</mi> </msub> </math></EquationSource> </InlineEquation> of the TESes should be uniform to ensure that all TESes operate at the same bias point with a series-bias current. Using an ion-milling process, we fabricate new titanium-based TES arrays consisting of 40 TESes. Each TES has lateral dimensions of 15&#xa0;µm&#xa0;<InlineEquation ID="IEq2"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10909_2025_3324_Article_IEq2.gif" Format="GIF" Height="13" Rendition="HTML" Resolution="72" Type="Linedraw" Width="19" /> </InlineMediaObject> <EquationSource Format="TEX">\(\times \)</EquationSource> <EquationSource Format="MATHML"><math> <mo>×</mo> </math></EquationSource> </InlineEquation>&#xa0;13&#xa0;µm. Our microwave-multiplexing measurement with rf-SQUIDs confirms that 24 out of the 40 TESes exhibit <InlineEquation ID="IEq3"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10909_2025_3324_Article_IEq3.gif" Format="GIF" Height="19" Rendition="HTML" Resolution="72" Type="Linedraw" Width="133" /> </InlineMediaObject> <EquationSource Format="TEX">\(T_\textrm{c} = (336 \pm 6)\,\textrm{mK}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <msub> <mi>T</mi> <mtext>c</mtext> </msub> <mo>=</mo> <mrow> <mo stretchy="false">(</mo> <mn>336</mn> <mo>±</mo> <mn>6</mn> <mo stretchy="false">)</mo> </mrow> <mspace width="0.166667em" /> <mtext>mK</mtext> </mrow> </math></EquationSource> </InlineEquation> uniform enough to apply the common bias. The yield is still 60%; however, this is the first report on the <InlineEquation ID="IEq4"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10909_2025_3324_Article_IEq4.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="17" /> </InlineMediaObject> <EquationSource Format="TEX">\(T_\textrm{c}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>T</mi> <mtext>c</mtext> </msub> </math></EquationSource> </InlineEquation> uniformity of the ion-milling-based TESes. Seven optical fibers are connected to TESes. Five out of the seven sensors show transition. They show energy resolution <InlineEquation ID="IEq5"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10909_2025_3324_Article_IEq5.gif" Format="GIF" Height="19" Rendition="HTML" Resolution="72" Type="Linedraw" Width="164" /> </InlineMediaObject> <EquationSource Format="TEX">\(0.54 \le {\Delta }E\,(\textrm{eV}) \le 0.62\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mn>0.54</mn> <mo>≤</mo> <mi mathvariant="normal">Δ</mi> <mi>E</mi> <mspace width="0.166667em" /> <mo stretchy="false">(</mo> <mtext>eV</mtext> <mo stretchy="false">)</mo> <mo>≤</mo> <mn>0.62</mn> </mrow> </math></EquationSource> </InlineEquation> without FRM. The best energy resolution achieved without flux ramp modulation is 0.54&#xa0;eV for a signal at 0.80&#xa0;eV.</p>

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Array of Optical Transition-Edge Sensors Fabricated by Ion-Milling Process Evaluated with Microwave Multiplexer for 100 or More Sensors

  • Takahiro Kikuchi,
  • Takeshi Jodoi,
  • Nao Kominato,
  • Ryota Hayakawa,
  • Tetsuya Tsuruta,
  • Go Fujii,
  • Kaori Hattori,
  • Daiji Fukuda,
  • Fuminori Hirayama,
  • Akira Sato

摘要

The optical transition-edge sensor (TES) pushes the boundary on fault-tolerant photonic quantum computers and low-invasive bio-imaging systems. As these systems evolve, there is an increasing demand for using a TES array comprising many sensors, often exceeding one hundred. Critical temperature \(T_c\) T c of the TESes should be uniform to ensure that all TESes operate at the same bias point with a series-bias current. Using an ion-milling process, we fabricate new titanium-based TES arrays consisting of 40 TESes. Each TES has lateral dimensions of 15 µm  \(\times \) ×  13 µm. Our microwave-multiplexing measurement with rf-SQUIDs confirms that 24 out of the 40 TESes exhibit \(T_\textrm{c} = (336 \pm 6)\,\textrm{mK}\) T c = ( 336 ± 6 ) mK uniform enough to apply the common bias. The yield is still 60%; however, this is the first report on the \(T_\textrm{c}\) T c uniformity of the ion-milling-based TESes. Seven optical fibers are connected to TESes. Five out of the seven sensors show transition. They show energy resolution \(0.54 \le {\Delta }E\,(\textrm{eV}) \le 0.62\) 0.54 Δ E ( eV ) 0.62 without FRM. The best energy resolution achieved without flux ramp modulation is 0.54 eV for a signal at 0.80 eV.